Abstract:For imaging nano-scaled samples, atomic force microscopy (AFM) and scanning electron microscopy (SEM) represent two complementary imaging techniques. In a hybrid SEM-AFM system, a compact AFM is installed inside the high vacuum chamber of an SEM, where SEM provides largely 2D imaging and material compositions of a sample while AFM is capable of complementarily measuring 3D topography of the sample. Although SEM can achieve real-time imaging (e.g., 20 Hz), AFM scan can take minutes to generate an image, demanding strategies for speeding up AFM measurement. In existing hybrid SEM-AFM systems, SEM and AFM measurements are made independently. This paper presents, for the first time, a technique of using SEM nanoscopic imaging to guide the scan speed of AFM imaging. The dynamic variation of AFM scan speed is based on features identified in SEM imaging. Information/features are extracted from real-time SEM images and quantitated using local entropy and other metrics. The generated feature metric map is used to produce a speed map for varying AFM scan speed at each position on the sample. Experiments were conducted with a new SEM-compatible AFM instrument we recently developed, as the test bed of the SEM-guided AFM scan technique. The results for the samples measured in this work demonstrate that time savings of this technique, compared to traditional AFM scan using a constant speed, were up to 66% with equivalent imaging accuracy obtained with traditional fine scan. With the same time cost of traditional fast scan, the SEM-guided AFM scan technique had an accuracy improvement of 47%.

On Detection and Estimation in Atomic Force Microscopy at Different Scan Speeds

High Speed Atomic Force Microscopy Enabled By A Sample Profile Estimator

Improved Sensitivity for Subsurface Imaging by Contact Resonance Atomic Force Microscopy Using Fano Peaks

A Novel Atomic Force Microscope with High Stability and Scan Speed

A Study on Spatial Resolution of the Microwave Atomic Force Microscope Imaging Affected by Scanning Speed

Real-time Scan Speed Control of the Atomic Force Microscopy for Reducing Imaging Time Based on Sample Topography.

A Parallel Kinematic Scanner Designed for High-Speed Atomic Force Microscopy

A PRACTICAL DYNAMIC IMAGING METHOD FOR FAST-SCANNING ATOMIC FORCE MICROSCOPY

Improving the scanning speed of atomic force microscopy at the scanning range of several tens of micrometers.

Experimental Verification of High Speed AFM Through Local Raster Scanning

A new type of atomic force microscope with multi-scanners

Fast Detection Based on Semi-Transient Signals in AFM

Demonstration of High Speed Afm Through Local Raster Scanning

High-speed Atomic Force Microscope with a Combined Tip-Sample Scanning Architecture.

Automated SEM-Guided AFM Scan with Dynamically Varied Scan Speed

Multi Scan Mode Atomic Force Microscope with Improved Properties and High Applicability

Improving the Imaging Speed of AFM with Modern Control Techniques

Design of High-Speed Atomic Force Microscope with a Separated X-scanner

Towards Tracking Moving Single Molecules In Atomic Force Microscopy

High-speed Atomic Force Microscope Technology: A Review

A Rate Adaptive Control Method for Improving the Imaging Speed of Atomic Force Microscopy.