A Comparison Study On Hydrogen Sensing Performance Of Pt/Moo3 Nanoplatelets Coated With A Thin Layer Of Ta2o5 Or La2o3

J. Yu,Y. Liu,F. X. Cai,M. Shafiei,G. Chen,N. Motta,W. Wlodarski,K. Kalantar-Zadeh,P. T. Lai
DOI: https://doi.org/10.1109/NEMS.2013.6559712
2013-01-01
Abstract:In this work, we investigate how hydrogen sensing performance of thermally evaporated MoO3 nanoplatelets can be further improved by RF sputtering a thin layer of tantalum oxide (Ta2O5) or lanthanum oxide (La2O3). We show that dissociated hydrogen atoms cause the thin film layer to be polarised, inducing a measurable potential difference greater than that as reported previously. We attribute these observations to the presence of numerous traps in the thin layer; their states allow a stronger trapping of charge at the Pt-thin film oxide interface as compared to the MoO3 sensors without the coating. Under exposure to H-2 (10 000 ppm), the maximum change in dielectric constant is 45.6 (at 260 degrees C) for the Ta2O5/MoO3 nanoplatelets and 31.6 (at 220 degrees C) for the La2O3/MoO3 nanoplatelets. Subsequently, the maximum sensitivity for the Ta2O5/MoO3 and La2O3/MoO3 based sensors is 16.8 and 7.5, respectively.
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