Abstract:Flat all-silicon metasurfaces have significant potential as ultrathin optical devices and systems that offer the advantages of mature fabrication technology and complementary metal–oxidesemiconductor compatibility. However, previously reported all-silicon metasurfaces suffered from the drawback of low transmission owing to the large intrinsic reflection loss induced by high-index silicon substrates. To achieve high transmission, silicon-based metasurfaces are usually composed of low-index dielectric substrates and silicon pillars. It is still a substantial challenge for an all-silicon metasurface to realize high transmission. In this paper, we present a design to overcome this drawback by integrating two-dimensional periodic arrays of subwavelength silicon cylinders as perfect antireflection resonators on the bottom and top surfaces of the silicon substrate. Using this design, a uniform array of all-silicon unit cells comprising a metasurface can exhibit high transmission, up to 99.5%, at the target wavelength of 10.6 µm, which indicates a significant improvement over the design without the antireflection scheme. Furthermore, as an example of a metasurface application, an all-silicon polarization-insensitive metalens is built based on a series of all-silicon unit cells with high transmission and 2π phase control, which indicates subwavelength-focusing capability. The transmission of the entire metalens reached 81.9%, and the focusing efficiency was 71%. This study not only recommends a means to develop ultrathin all-silicon optical devices with high efficiency but also proposes a general approach to achieve high-quality metasurfaces based on a single high-index dielectric.

Near-Infrared Quarter-Waveplate with Near-Unity Polarization Conversion Efficiency Based on Silicon Nanowire Array

Hybrid Bilayer Plasmonic Metasurface Efficiently Manipulates Visible Light

High-efficiency, Broadband, and Wide-Angle All-Dielectric Quarter Wave Plate Based on Anisotropic Electric and Magnetic Dipole Resonances.

Broadband and Wide Field-of-view Plasmonic Metasurface-enabled Waveplates

High efficient metasurface quarter-wave plate with wavefront engineering

Sub-wavelength Quarter-Wave Plate Based on Plasmonic Patch Antennas

Highly Efficient Metasurface Quarter‐Wave Plate with Wave Front Engineering

Plasmonic Wave Plate Based on Subwavelength Nanoslits

Dielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation

Improving Efficiency and Birefringence of an All-Dielectric Metasurface Quarter-Wave Plate Using Graphene

Broadband-tunable quarter wave plates based on paired metal nanowire grids

Dual-Band Polarization Converter with Antireflection-Assisted All-Dielectric Metasurface

Silicon-based Infrared Metamaterials with Ultra-Sharp Fano Resonances

Functional Metasurface Quarter-Wave Plates for Simultaneous Polarization Conversion and Beam Steering.

Single-Layer Plasmonic Metasurface Half-Wave Plates with Wavelength-Independent Polarization Conversion Angle

High-efficiency All-Silicon Metasurfaces with 2π Phase Control Based on Multiple Resonators

Realizing Full Visible Spectrum Metamaterial Half-Wave Plates with Patterned Metal Nanoarray/insulator/metal Film Structure.

Polarization Beam Splitters, Converters and Analyzers Based on A Metasurface Composed of Regularly Arranged Silicon Nanospheres with Controllable Coupling Strength

Efficient silicon metasurfaces for visible light

Si metasurface half-wave plates demonstrated on a 12-inch CMOS platform

Polarization-Tuned Fano Resonances in All-Dielectric Short-Wave Infrared Metasurface