Abstract:Conducting polymers have attracted great attention since the discovery of high conductivity in doped polyacetylene in 1977(1). They offer the advantages of low weight, easy tailoring of properties and a wide spectrum of applications(2,3). Due to sensitivity of conducting polymers to environmental conditions (e.g., air, oxygen, moisture, high temperature and chemical solutions), lithographic techniques present significant technical challenges when working with these materials(4). For example, current photolithographic methods, such as ultra-violet (UV), are unsuitable for patterning the conducting polymers due to the involvement of wet and/or dry etching processes in these methods. In addition, current micro/nanosystems mainly have a planar form(5,6). One layer of structures is built on the top surfaces of another layer of fabricated features. Multiple layers of these structures are stacked together to form numerous devices on a common substrate. The sidewall surfaces of the microstructures have not been used in constructing devices. On the other hand, sidewall patterns could be used, for example, to build 3-D circuits, modify fluidic channels and direct horizontal growth of nanowires and nanotubes. A macropunching method has been applied in the manufacturing industry to create macropatterns in a sheet metal for over a hundred years. Motivated by this approach, we have developed a micropunching lithography method (MPL) to overcome the obstacles of patterning conducting polymers and generating sidewall patterns. Like the macropunching method, the MPL also includes two operations (Fig. 1): (i) cutting; and (ii) drawing. The "cutting" operation was applied to pattern three conducting polymers(4), polypyrrole (PPy), Poly(3,4-ethylenedioxythiophen)-poly(4-styrenesulphonate) (PEDOT) and polyaniline (PANI). It was also employed to create Al microstructures(7). The fabricated microstructures of conducting polymers have been used as humidity(8), chemical(8), and glucose sensors(9). Combined microstructures of Al and conducting polymers have been employed to fabricate capacitors and various heterojunctions(9,10,11). The "cutting" operation was also applied to generate submicron-patterns, such as 100- and 500-nm-wide PPy lines as well as 100-nm-wide Au wires. The "drawing" operation was employed for two applications: (i) produce Au sidewall patterns on high density polyethylene (HDPE) channels which could be used for building 3D microsystems(12,13,14), and (ii) fabricate polydimethylsiloxane (PDMS) micropillars on HDPE substrates to increase the contact angle of the channel(15).

Versatile Surface Micropatterning And Functionalization Enabled By Microcontact Printing Of Poly(4-Aminostyrene)

Tuning Microparticle Porosity During Single Needle Electrospraying Synthesis Via A Non-Solvent-Based Physicochemical Approach

Chemical Modification on Top of Nanotopography to Enhance Surface Properties of PDMS

A Microcontact Printing Induced Supramolecular Self-Assembled Photoactive Surface for Patterning Polymer Brushes

Highly Tunable Complementary Micro/Submicro-Nanopatterned Surfaces Combining Block Copolymer Self-Assembly and Colloidal Lithography.

Solid-Phase Microcontact Printing for Precise Patterning of Rough Surfaces: Using Polymer-Tethered Elastomeric Stamps for the Transfer of Reactive Silanes

Fabrication of Patterned Polymer Resists for Ion Etching by Using Dewetting

Multifunctional Photodegradable Polymers for Reactive Micropatterns

Tunable patterning of microscale particles using a surface acoustic wave device with slanted-finger interdigital transducers

Engineering Surface Patterns with Shape Memory Polymers: Multiple Design Dimensions for Diverse and Hierarchical Structures

A Facile Method of Forming Nanoscale Patterns on Poly(ethylene Glycol)-Based Surfaces by Self-Assembly of Randomly Grafted Block Copolymer Brushes.

Covalent micropatterning of poly(dimethylsiloxane) by photografting through a mask

Surface engineering of mixed conjugated/polyelectrolyte brushes - Tailoring interface structure and electrical properties

Stratified Polymer Brushes from Microcontact Printing of Polydopamine Initiator on Polymer Brush Surfaces

Micropunching lithography for generating micro- and submicron-patterns on polymer substrates

Facile and Rapid Microcontact Printing of Additive-Free Polydimethylsiloxane for Biological Patterning Diversity

Implementation of high‐performance, freestanding flexible film masks through photosensitive polyimide for arbitrary surface micropatterns creation

Patterning Nanoparticles by Microcontact Printing and Further Growth of One-Dimensional Nanomaterials

Patterning of polypyrrole using protein-based template and their potential application in resist

High‐Resolution Patterned Functionalization of Slippery “Liquid‐Like” Brush Surfaces via Microdroplet‐Confined Growth of Multifunctional Polydopamine Arrays

A Simple Method to Fabricate A Conductive Polymer Micropattern on an Organic Polymer Substrate