Abstract:Conducting polymers have attracted great attention since the discovery of high conductivity in doped polyacetylene in 1977(1). They offer the advantages of low weight, easy tailoring of properties and a wide spectrum of applications(2,3). Due to sensitivity of conducting polymers to environmental conditions (e.g., air, oxygen, moisture, high temperature and chemical solutions), lithographic techniques present significant technical challenges when working with these materials(4). For example, current photolithographic methods, such as ultra-violet (UV), are unsuitable for patterning the conducting polymers due to the involvement of wet and/or dry etching processes in these methods. In addition, current micro/nanosystems mainly have a planar form(5,6). One layer of structures is built on the top surfaces of another layer of fabricated features. Multiple layers of these structures are stacked together to form numerous devices on a common substrate. The sidewall surfaces of the microstructures have not been used in constructing devices. On the other hand, sidewall patterns could be used, for example, to build 3-D circuits, modify fluidic channels and direct horizontal growth of nanowires and nanotubes. A macropunching method has been applied in the manufacturing industry to create macropatterns in a sheet metal for over a hundred years. Motivated by this approach, we have developed a micropunching lithography method (MPL) to overcome the obstacles of patterning conducting polymers and generating sidewall patterns. Like the macropunching method, the MPL also includes two operations (Fig. 1): (i) cutting; and (ii) drawing. The "cutting" operation was applied to pattern three conducting polymers(4), polypyrrole (PPy), Poly(3,4-ethylenedioxythiophen)-poly(4-styrenesulphonate) (PEDOT) and polyaniline (PANI). It was also employed to create Al microstructures(7). The fabricated microstructures of conducting polymers have been used as humidity(8), chemical(8), and glucose sensors(9). Combined microstructures of Al and conducting polymers have been employed to fabricate capacitors and various heterojunctions(9,10,11). The "cutting" operation was also applied to generate submicron-patterns, such as 100- and 500-nm-wide PPy lines as well as 100-nm-wide Au wires. The "drawing" operation was employed for two applications: (i) produce Au sidewall patterns on high density polyethylene (HDPE) channels which could be used for building 3D microsystems(12,13,14), and (ii) fabricate polydimethylsiloxane (PDMS) micropillars on HDPE substrates to increase the contact angle of the channel(15).

Patterning of polypyrrole using protein-based template and their potential application in resist

Polyvinylpyrrolidone Hybrid Photoresist for Two-color Sensitive Direct Laser Writing

Fabrication of polypyrrole micropatterns through microchannel-confined electropolymerization and their electrical conductivities

Recent progress in non-photolithographic patterning of polymer thin films

Micropunching lithography for generating micro- and submicron-patterns on polymer substrates

Micropatterns of Protein and Conducting Polymer Molecules Fabricated by Layer-by-Layer Self-Assembly and Photolithography Techniques

Fabrication of Patterned Polymer Resists for Ion Etching by Using Dewetting

Interface Effect on the Electropolymerized Polypyrrole Films with Hollow Micro/Nanohorn Arrays

Precise Protein Photolithography (P3): High Performance Biopatterning Using Silk Fibroin Light Chain As the Resist.

Multifunctional Photodegradable Polymers for Reactive Micropatterns

Directly Patterning Conductive Polymer Electrodes on Organic Semiconductor via In Situ Polymerization in Microchannels for High-Performance Organic Transistors

Synthesis, characterization, and efficient electrohydrodynamic patterning with a high aspect ratio of a soluble oligomerpyrrole derivative

Polypyrrole micro/nanostructures and their soft materials in versatile forms: construction and applications

A Simple Method to Fabricate A Conductive Polymer Micropattern on an Organic Polymer Substrate

Allylamine PECVD Modification of PDMS as Simple Method to Obtain Conductive Flexible Polypyrrole Thin Films

Versatile Surface Micropatterning And Functionalization Enabled By Microcontact Printing Of Poly(4-Aminostyrene)

Fabrication Of Polypyrrole Hollow Y-Junction And Capsule Using Azo-Dye Templates

A Methacryl Ethyl-Functionalized Soluble Polypyrrole: Synthesis, Characterization, and Potentiality in Rapid Fabrication of High-Aspect-Ratio Pillar Arrays

Polymerization and surface analysis of electrically-conductive polypyrrole on surface-activated polyester fabrics for biomedical applications

Synthesis and characterization of nanostructured polypyrroles: Morphology-dependent electrochemical responses and chemical deposition of Au nanoparticles

Reactive Μcp on Ultrathin Block Copolymer Films: Localized Chemistry for Micro- and Nano-Scale Biomolecular Patterning