Abstract:Fixed abrasive lapping (FAL) is a promising technology increasingly used for finishing optical mirrors and molds in a number of materials due to its high finishing efficiency, environmental friendliness, and relatively better surface and subsurface quality. A theoretical model for fixed-abrasive lapping of optical glass was developed in this paper by using indentation fracture mechanics, contact mechanics, mathematical statistics, lapping kinematics, and convolution iterative principle to provide an enhanced scientific understanding of the surface microtopography generation and subsurface damage (SSD) control mechanisms. In the modeling, the influence of the shape, size, and spatial distribution of abrasive particles and the ductile and brittle removal mechanisms of the material were considered. A series of lapping experiments on fused silica glass was carried out to quantitatively analyze the feasibility and accuracy of the model and study the influence mechanism of process parameters on the surface and subsurface state. Results indicated that the models could well predict the surface micromorphology and the SSD depth, and the range of sharpness angle of abrasive particles and tool load affected the predicted SSD range. In addition, the material removal mechanism and lapping tool wear characteristics were revealed by the surface structure and element component analysis. Finally, the FAL process was optimized by the evaluation indices of material removal rate (MRR), surface roughness, and SSD.

Subsurface Damage of Fused Silica Lapped by Fixed-Abrasive Diamond Pellets.

Subsurface Damages of Fused Silica Developed During Deterministic Small Tool Polishing.

Characterizing subsurface damage in loose abrasive grinding of fused silica glass

Study on removal mechanism and removal characters for SiC and fused silica by fixed abrasive diamond pellets

Theoretical and experimental investigation on surface generation and subsurface damage in fixed abrasive lapping of optical glass

Further Investigations on Fixed Abrasive Diamond Pellets Used for Diminishing Mid-Spatial Frequency Errors of Optical Mirrors.

Rapid detection of subsurface damage ofoptical materials in lapping process and its influence regularity

Subsurface damage distribution in the lapping process.

Characterization of Subsurface Damage of Optical Materials in Lapping Process

Research on Subsurface Damage of Lapping Sapphire with Diamond Fixed Abrasive

Fixed Abrasive Polishing: the Effect of Particle Size on the Workpiece Roughness and Sub-Surface Damage

Lapping performance of mixed-size agglomerated diamond abrasives in fixed abrasives pads

Surface and Subsurface Damage of Fused Quartz Glass Induced by Shear-Thickening Polishing

Non-destructive testing of subsurface damage for early indication of laser-induced damage threshold in fused silica

Tribological effects of loose alumina abrasive assisted sapphire lapping by a fixed agglomerated diamond abrasive pad (FADAP)

Fused Silica Fine Grinding with Low Roughness

Investigation on surface evolution and subsurface damage in abrasive lapping of hard and brittle materials using a novel fixed lapping tool

In-situ reconditioning mechanism for fixed abrasive pads based on the wear behavior of loose grains

Investigation of Grinding and Lapping Surface Damage Evolution of Fused Silica by Inductively Coupled Plasma Etching

Mechanical Lapping and Chemical-Mechanical Polishing Process for Single Crystal Diamond

Detection of Subsurface Damage and Material Removal Mechanism in Optical Polishing Process