Nanoscale Growth and Patterning of Inorganic Oxides Using DNA Nanostructure Templates.

Sumedh P. Surwade,Feng Zhou,Bryan Wei,Wei Sun,Anna Powell,Christina O'Donnell,Peng Yin,Haitao Liu
DOI: https://doi.org/10.1021/ja401785h
IF: 15
2013-01-01
Journal of the American Chemical Society
Abstract:We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition of SiO2 and TiO2 with nanometer-scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positive-tone and negative-tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens the door to the use of DNA nanostructures as general-purpose templates for high-resolution nanofabrication.
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