Abstract:Abstract One-dimensional particle-in-cell/Monte Carlo collisional simulations are performed on a capacitive 2.54 cm gap, 1.6 Torr argon discharge driven by a sinusoidal rf current density amplitude of 50 A m −2 at 13.56 MHz. The excited argon states (metastable levels, resonance levels, and the 4p manifold) are modeled self-consistently with the particle dynamics as space- and time-varying fluids. Four cases are examined, including and neglecting excited states, and using either a fixed or energy-dependent secondary electron emission yield due to ion and/or neutral impact on the electrodes. The results for all cases show that most of the ionization occurs near the plasma-sheath interfaces, with little ionization within the plasma bulk region. Without excited states, secondary electrons emitted from the electrodes are found to play a strong role in the ionization process. When the excited states, and secondary electron emission due to neutral and ion impact on the electrodes are included in the discharge model, the discharge operation transitions from α-mode to γ-mode, in which nearly all the ionization is due to secondary electrons. Secondary electron production due to the bombardment of excited argon atoms was approximately14.7 times greater than that due to ion bombardment. Electron impact of ground state argon atoms by secondary electrons contributes about 76% of the total ionization; primary electrons, about 11%; metastable Penning ionization, about 13%; and multi-step ionization, about 0.3%.

The Role of Carrier Gases in the Production of Metastable Argon Atoms in a Rf Discharge

Beam of Metastable Krypton Atoms Extracted from a Rf-Driven Discharge

Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge

Nonequilibrium Excited Particle Population Distribution in Low-Temperature Argon Discharges

Surface effects in a capacitive argon discharge in the intermediate pressure regime

Role of Metastable Atoms in the Propagation of Atmospheric Pressure Dielectric Barrier Discharge Jets

Emission Characteristics of Argon Plasma Generated by RF Hollow Cathode Discharge at Low Pressure

Beam of Metastable Krypton Atoms Extracted from A Microwave-Driven Discharge

Thermal Beam of Metastable Krypton Atoms Produced by Optical Excitation

Discharge Characteristics Of Atmospheric-Pressure Radio-Frequency Glow Discharges With Argon/Nitrogen

Argon difluoride stabilized at high pressure

Effects of the Shielding Cylinder and Substrate on the Characteristics of an Argon Radio-Frequency Atmospheric Glow Discharge Plasma Jet

A Simple Collisional–radiative Model for Low-Temperature Argon Discharges with Pressure Ranging from 1 Pa to Atmospheric Pressure: Kinetics of Paschen 1s and 2p Levels

Measurement of the Electron Density in Atmospheric-Pressure Low-Temperature Argon Discharges by Line-Ratio Method of Optical Emission Spectroscopy

A Magnetically Enhanced RF Discharge Source for Metastable Krypton Production.

A Simple Collisional–radiative Model for Low-Pressure Argon–oxygen Mixture Discharges

Suppression of runaway electrons by injection of argon gas in the low-density discharges in the STOR-M tokamak

Bright Metastable Noble Gas Atomic Beam and Atom Trap Using Laser Cooling

Numerical Study of Argon Ions Transported Across the Sheath in Electron Cyclotron Resonance Discharges

Use of Xenon and Krypton as Carrier Gases for a Highly Sensitive Detection System for Gas Chromatography

Determining the Electron Temperature and the Electron Density by a Simple Collisional–radiative Model of Argon and Xenon in Low-Pressure Discharges