Emission Characteristics of Argon Plasma Generated by RF Hollow Cathode Discharge at Low Pressure

许建平,巩春志,田修波
DOI: https://doi.org/10.3969/j.issn.1672-7126.2013.10.05
2013-01-01
Abstract:The emission characteristics of the argon plasma, generated by a RF hollow cathode discharge at a low pressure, were experimentally studied. The influence of the discharge conditions, such as the gas flow rate, RF power, and pressure, on the electron temperature and optical emission intensity was evaluated. The results included: i). As the gas flow rate increased, the emission intensity and electron temperature changed in an increase-decrease mode, possibly because of the increasing collision; ii). The emission intensity increased with an increase of the RF power; iii). As the pressure increased, at a gas flow rate below 20 mL/min, the electron temperature varied in an increase-decrease mode; but at a gas flow rate above 30 mL/min, an increase of the pressure little affected the electron temperature. We found that a higher electron temperature originated from a lower gas flow rate.
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