Abstract:Photonic crystal (PhC) nanocavities have demonstrated unique capabilities in terms of light confinement and manipulation. As such, they are becoming attractive for the design of novel resonance-based photonic integrated circuits (PICs). Here two essential challenges arise however - how to realize ultrahigh-Q PhC cavities using standard fabrication processes compatible with large volume fabrication, and how to efficiently integrate them with other standard building blocks, available in exiting PIC platforms. In this work, we demonstrate ultrahigh-Q 1D PhC nanocavities fabricated on a 300 mm SOI wafer by optical lithography, with a record Q factor of up to 0.84 million. Moreover, we show efficient mode management in those oxide embedded cavities by coupling them with an access waveguide and realize two critical components: notch filters and narrow-band reflectors. In particular, they allow both single-wavelength and multi-wavelength operation, at the desired resonant wavelengths, while suppressing all other wavelengths over a broad wavelength range (>100 nm). Compared to traditional cavities, this offers a fantastic strategy for implementing resonances precisely in PIC designs with more freedom in terms of wavelength selectivity and the control of mode number. Given their compatibility with optical lithography and compact footprint, the realized 1D PhC nanocavities will be of profound significance for designing compact and novel resonance-based photonic components on large scale.

An In-Plane Nano-Mechanics Approach to Achieve Reversible Resonance Control of Photonic Crystal Nanocavities.

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Dynamically Reconfigurable Photonic Crystal Nanobeam Cavities

Port reconfigurable phase-change resonator

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Controlled coupling of photonic crystal cavities using photochromic tuning

Deterministic Integrated Tuning of Multicavity Resonances and Phase for Slow-Light in Coupled Photonic Crystal Cavities

Adaptive Control of Necklace States in a Photonic Crystal Waveguide

Deterministic Resonance and Phase Control for Photonic Sub- and Super-Radiance in Coupled Nanocavities

Deterministic integrated tuning of multi-cavity resonances and phase for slow-light in coupled photonic crystal cavities

Dynamic Tuning of the Q Factor in a Photonic Crystal Nanocavity Through Photonic Transitions.

Precise control of coupling strength in photonic molecules over a wide range using nanoelectromechanical systems

Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform

Spectral engineering of optical microresonators in anisotropic lithium niobate crystal

In-situ tuning of optomechanical crystals with nano-oxidation

High-precision spectral tuning of micro and nanophotonic cavities by resonantly enhanced photoelectrochemical etching

Realization of dynamically controlled resonator pairs in nanomechanical arrays

Control of Fano Resonances in Photonic Crystal Nanobeams Side-Coupled with Nanobeam Cavities and Their Applications to Refractive Index Sensing

On-Chip Multidimensional Dynamic Control of Twisted Moiré Photonic Crystal for Smart Sensing and Imaging

Port Reconfigurable Phase-Change Optical Resonator

Deterministic Aperiodic Photonic Crystal Nanobeam Supporting Adjustable Multiple Mode-Matched Resonances