Batch fabricated long throw bi-stable electromagnetic micro-actuator

Dai, X.H.,Ding, G.,Zhao, X.L.
DOI: https://doi.org/10.1049/el.2010.2109
2010-01-01
Electronics Letters
Abstract:A long throw bi-stable electromagnetic micro-actuator is presented. Its configuration was easy to be batch fabricated. According to the experiment results, when the actuator was applied with a 5 V voltage pulse, the bi-stable switch was realised and the output displacement was larger than 150 m. Its overall size is 6 ?? 6 ?? 3 mm. The device structure, principle and fabrication method are also presented.
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