Atmospheric Pressure Plasma Jet Applications
Park, J.,Herrmann, H.W.,Henins, L.,Selwyn, G.S.
DOI: https://doi.org/10.1109/plasma.1998.677890
1998-01-01
Abstract:Summary form only given. The atmospheric pressure plasma jet (APPJ) is a non-thermal, high pressure plasma discharge that produces a high velocity effluent stream of highly reactive chemical species. The discharge operates on a feedstock gas (e.g. He/O/sub 2//H/sub 2/O) which flows between two concentric cylindrical electrodes: an outer grounded electrode and an inner electrode powered at 13.56 MHz RF. While passing through the plasma, the feedgas becomes excited, ionized or dissociated by electron impact. The fast-flowing effluent consists of ions and electrons, which are rapidly lost by recombination, highly reactive radicals (e.g. O, OH), and metastable species (e.g. O/sub 2/*). The metastable O/sub 2/, which is reactive to hydrocarbon and other organic species, has been observed through optical emission spectroscopy to decrease by a factor of 2 from the APPJ nozzle exit to a distance of 10 cm. Unreacted metastable O/sub 2/, and that which does not impinge on a surface, will then decay back to ordinary ground state O/sub 2/, resulting in a completely "dry", environmentally-benign form of surface cleaning. Applications such as removal of photoresist, oxide films and organic residues from wafers for the electronics industry, decontamination of civilian and military areas and personnel exposed to chemical or biological warfare agents, and paint (e.g. graffiti) removal are being considered.