Abstract:As one of the important diffractive optical elements, the submicron gratings on flexible substrates can actively and precisely control the dispersion and steering characteristics of beams and have been widely applied in deformation detection technologies. Herein, we propose a spatially modulated femtosecond laser-assisted molding technology for efficiently fabricating high-uniformity large-area submicron gratings with tunable periods on flexible substrates. The technology first uses a cylindrically focused femtosecond laser-assisted chemical etching method to form a regular submicron grating on silicon; subsequently, the structure is cast with polydimethylsiloxane, a useful flexible substrate with a small Young's modulus, and cured to obtain a high-uniformity large-area submicron grating with a tunable period. The grating exhibits high mechanical stability and sensitivity and favorable optical properties. In the present study, as the deformation of the grating increased from 0 to 10%, the diffraction angle changed by 6.5°. Under illumination by a broad-band white-light source, distinguishable multicolor diffraction patterns were clearly observed. Drawing on this characteristic, we fabricated a deformation sensor. The grating fabricated by using the proposed technology also has potential applications in optical sensors and soft robots.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsami.2c01735.Images of the fabricated large-area SGTP and its local microstructures; schematic of diffraction intensity measurement; relationship between the grating period and deformation; color stripes diffracted by the SGTP before and after deformation; structural colors reflected by the pigeon pattern from different angles; contact angle of PDMS and SGTP with water; XPS spectra of silicon samples after silanization; and comparison of the proposed technology in this article with other technologies (PDF)Movement of the rainbow diffraction pattern (MP4)Process of changing the structural colors of the pigeon pattern (MP4)This article has not yet been cited by other publications.

Stability Improved Stretchable Metallic Gratings with Tunable Grating Period in Submicron Scale

Stretching-tunable Metal Gratings Fabricated on an Elastomeric Substrate Using a Water-Soluble Sacrificial Layer

High Resolution Direct Writing Liquid Metal Patterns for Printed Stretchable Electronics

High-Resolution Rapid Prototyping of Liquid Metal Electronics by Direct Writing on Highly Prestretched Substrates

Direct Fabrication of Stretchable Electronics on a Polymer Substrate with Process‐Integrated Programmable Rigidity

Stretchable optical diffraction grating from poly(acrylic acid)/polyethylene oxide stereocomplex

High-Uniformity Submicron Gratings with Tunable Periods Fabricated through Femtosecond Laser-Assisted Molding Technology for Deformation Detection

A mechanically tunable plasmonic structure composed of a monolayer array of metal-capped colloidal spheres on an elastomeric substrate

A Stretch-Tunable Plasmonic Structure with a Polarization-Dependent Response.

Monolithically Integrated Stretchable Photonics

Tuning the Period of Nanogratings Using Mechanical Stretching and Nanoimprint Lithography

Creation and Transfer of Gratings with Designed Spatially Varying Periodicity

Design of Strain-Limiting Substrate Materials for Stretchable and Flexible Electronics

Soft Elastomers with Programmable Stiffness As Strain-Isolating Substrates for Stretchable Electronics.

Stretchable Metamaterials with Tamm/Fano Resonances for Tunable, Efficient Mechanochromic Color Shifting

A facile and scalable patterning approach for ultrastretchable liquid metal features

Stretchable plasmonic metasurfaces for deformation monitoring

Grating-structured metallic microsprings.

Stretchable Metamaterials with Tunable Infrared Emissivity for Dynamic Thermal Management

Flexible Substrates Enabled Highly Integrated Patterns with Submicron Precision Toward Intrinsically Stretchable Circuits

Highly Stable and Stretchable Conductive Films through Thermal‐Radiation‐Assisted Metal Encapsulation