Two-Dimensional Nanoelectromechanical Systems (2d Nems) Via Atomically-Thin Semiconducting Crystals Vibrating at Radio Frequencies

Philip X. -L. Feng,Zenghui Wang,Jaesung Lee,Rui Yang,Xuqian Zheng,Keliang He,Jie Shan
DOI: https://doi.org/10.1109/iedm.2014.7047008
2014-01-01
Abstract:We report on the initial explorations of engineering atomically-thin semiconducting crystals into a new class of two-dimensional nanoelectromechanical systems (2D NEMS) that are attractive for realizing ultimately thin 2D transducers for embedding in both planar and curved systems. We describe the first resonant NEMS operating at radio frequencies (RF), based on MoS2, a hallmark of 2D semiconducting crystals derived from layered materials in transition metal dichalcogenides (TMDCs). Through a series of careful measurements and analyses, we demonstrate a family of MoS2 2D NEMS resonators possessing very high fundamental-mode frequencies (f(0)similar to 120MHz, in the VHF band), very broad dynamic range (DR similar to 70-110dB), rich nonlinear dynamics, and outstanding electrical tunability.
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