Basic properties of electrolyte-oxide-semiconductor structures with applications in biochemical sensing

Hao Wang,Jianguang Gao,Zhuojie Chen,Wengang Wu
DOI: https://doi.org/10.1109/ICSICT.2014.7021217
2014-01-01
Abstract:We present the basic properties and potential applications of a kind of electrolyte-oxide-semiconductor (EOS) structure, which is composed of a Si layer, a SiO2 layer, and an electrolyte solution layer, from bottom to top. It is demonstrated that the EOS structures exhibit a stable one-way electrical conductivity like a diode, and there is a threshold voltage in the ON-switching process. Moreover, it is found that the thicknesses of SiO2 layers and the concentrations of electrolyte solutions affect the current density obviously. A conductive-filament model is proposed to analyze the conductivity mechanism of EOS structures. The EOS structures can be used for many biochemical applications. We have realized copper-ion detection and pH sensing by utilizing their basic characteristics.
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