Wideband Tunable Love Wave Filter Using Electrostatically Actuated Mems Variable Capacitors Integrated on Lithium Niobate

Toshiki Yasue,Tomoya Komatsu,Nobuyuki Nakamura,Ken-ya Hashimoto,Hideki Hirano,Masayoshi Esashi,Shuji Tanaka
DOI: https://doi.org/10.1016/j.sna.2012.01.017
2012-01-01
Abstract:A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. In this study, a wideband tunable filter with the center frequency of 1.08GHz was fabricated by directly integrating Love wave resonators and electrostatically actuated MEMS variable capacitors on a 15° Y LiNbO3 wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k2∼30%), providing wide bandwidth and wide tuning range. The 3dB bandwidth was tuned from 146MHz to 130MHz by applying 15V to one of the MEMS variable capacitors.
What problem does this paper attempt to address?