Crystalline Silicon Nanomembrane Stacking for Large-Area Flexible Photodetectors

Weiquan Yang,Hongjun Yang,Guoxuan Qin,Huiqing Pang
DOI: https://doi.org/10.1109/group4.2009.5338343
2009-01-01
Abstract:Flexible photodetectors were demonstrated experimentally on large-area crystalline silicon nanomembranes (3 mm times 3 mm), based on wet transfer and metal-frame supported transfer processes. Very low dark current (a few nA) and linear photoresponses were demonstrated for both Si MSM and InP PIN photodiodes on flexible PET substrates.
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