Abstract:Since the discovery of the unconventional copper-oxide high-transition-temperature superconductors (HTS), researchers have explored many methods to fabricate superconducting tunnel junctions from these materials for both superconducting electronics operating at the practical temperature of liquid nitrogen (77 K) and for fundamental measurements essential for testing and guiding theories of these remarkable superconductors. The difficulty is that the traditional estimate of the superconducting coherence length is very short and anisotropic in these materials, typically ~2 nm in the a-b plane and ~0.2 nm along the c-axis. The coherence volume encloses very few superconducting pairs, so even the presence of small scale inhomogeneities can locally disrupt superconductivity unlike in conventional superconductors. Therefore the electrical properties of Josephson junctions are sensitive to chemical variations and structural defects on atomic length scales, thus to make multiple uniform HTS junctions, control at the atomic level is required. In this letter, we demonstrate very high-quality all-HTS Josephson superconducting tunnel junctions (both Josephson and quasiparticle tunneling) created by using a 500 pm diameter focused beam of helium ions to direct-write tunnel barriers into YBa2Cu3O7(YBCO) thin films. With this method we demonstrate the ability to control the barrier properties continuously from conducting to insulating by varying the irradiation dose. This technique provides a reliable and reproducible pathway for the scaling up of quantum mechanical circuits operating at practical temperatures (~77 K) as well as an avenue to conduct superconducting tunneling studies in HTS for basic science.

Growth of Electron-Doped Superconductor Films and Their Applications to Intrinsic Josephson Junctions

Growth of Electron-Doped Superconductor ${\rm Pr}_{0.9}{\rm LaCe}_{0.1}{\rm CuO}_{4}$ Films and Their Applications to Intrinsic Josephson Junctions

In-plane magnetoresistance of electron-doped superconducting thin films Pr0.9LaCe0.1CuO4

Intrinsic Josephson Junctions In C-Axis-Oriented La1.85sr0.15cuo4 Thin Films

Quantum interference in a high-transition-temperature superconductor based on nanoslits on SrTiO3 substrate

Surface Josephson plasma waves in a high-temperature superconductor

Thick Bi2Sr2CaCu2O8+δ films grown by liquid-phase epitaxy for Josephson THz applications

Progressive evolution of tunneling characteristics of in-situ fabricated intrinsic Josephson junctions in Bi_2Sr_2CaCu_2O_{8+delta} single crystals

The intrinsic Josephson effect of Bi-2212 superconducting thin films prepared by sol-gel method

Transport Properties of Tl2Ba2CaCu2O8 Microbridges on a Low-Angle Step Substrate

Bi2sr2cacu2o8+Delta Intrinsic Josephson Junctions Fabricated By A Simple Technique Without Photolithography

Supercurrent, Multiple Andreev Reflections and Shapiro Steps in InAs Nanosheet Josephson Junctions

Prominent Josephson Tunneling Between Twisted Single Copper Oxide Planes of Bi_2Sr_2-xLaxCuO_6+y

Pulsed Laser Deposition of YBa2Cu3O7 /i/lanio3trilayers (I SrTiO3, CeO2or Eu2CuO4) on (100) SrTiO3substrates

Prominent Josephson tunneling between twisted single copper oxide planes of Bi2Sr2-xLaxCuO6+y

Electronically driven superconductor insulator transition in electrostatically doped La$_{2}$CuO$_{4+δ}$ thin films

Bi/sub 2/sr/sub 2/cacu/sub 2/o/sub 8+/spl Delta// Intrinsic Josephson Junctions Fabricated by a Simple Technique Without Photolithography

Intrinsic Josephson Junction Array with Typical Tunneling Characteristics in Oxygen-Deficient Ybacuo Thin Films

Nano Josephson Superconducting Tunnel Junctions in Y-Ba-Cu-O Direct- Patterned with a Focused Helium Ion Beam

Fabrication and Characteristics of Intrinsic Josephson Junctions in Bi 2 Sr 2 CaCu 2 O 8+x Single Crystals

Electron beam lithography and ion implantation techniques for fabrication of high-Tc Josephson junctions