Chen Sun,Michael Georgas,Jason Orcutt,Benjamin Moss,Yu-Hsin Chen,Jeffrey Shainline,Mark Wade,Karan Mehta,Kareem Nammari,Erman Timurdogan,Daniel Miller,Ofer Tehar-Zahav,Zvi Sternberg,Jonathan Leu,Johanna Chong,Reha Bafrali,Gurtej Sandhu,Michael Watts,Roy Meade,Miloš Popović,Rajeev Ram,Vladimir Stojanović,Milos Popovic,Vladimir Stojanovic

Abstract:Silicon-photonics is an emerging technology that can overcome the tradeoffs faced by traditional electrical I/O. Due to ballooning development costs for advanced CMOS nodes, however, widespread adoption necessitates seamless photonics integration into mainstream processes, with as few process changes as possible. In this work, we demonstrate a silicon-photonic link with optical devices and electronics integrated on the same chip in a 0.18 µm bulk CMOS memory periphery process. To enable waveguides and optics in process-native polysilicon, we introduce deep-trench isolation, placed underneath to prevent optical mode leakage into the bulk silicon substrate, and implant-amorphization to reduce polysilicon loss. A resonant defect-trap photodetector using polysilicon eliminates need for germanium integration and completes the fully polysilicon-based photonics platform. Transceiver circuits take advantage of photonic device integration, achieving 350 fJ/b transmit and 71 µA pp BER = 10 -12 receiver sensitivity at 5 Gb/s. We show high fabrication uniformity and high-Q resonators, enabling dense wavelength-division multiplexing with 9-wavelength 45 Gb/s transmit/receive data-rates per waveguide/fiber. To combat perturbations to variation- and thermally-sensitive resonant devices, we demonstrate an on-chip thermal tuning feedback loop that locks the resonance to the laser wavelength. A 5 m optical chip-to-chip link achieves 5 Gb/s while consuming 3 pJ/b and 12 pJ/bit of circuit and optical energy, respectively.

Demonstration of first WDM CMOS photonics transceiver with monolithically integrated photo-detectors

A Monolithically-Integrated Chip-to-Chip Optical Link in Bulk CMOS

A 90nm CMOS integrated Nano-Photonics technology for 25Gbps WDM optical communications applications

Silicon Photonic Micro-Ring Modulator-based 4 x 112 Gb/s O-band WDM Transmitter with Ring Photocurrent-based Thermal Control in 28nm CMOS

A 3D Integrated Energy-Efficient Transceiver Realized by Direct Bond Interconnect of Co-Designed 12 nm FinFET and Silicon Photonic Integrated Circuits

Integrated 800 Gb/s O-band WDM optical transceiver enabled by hybrid InP-polymer photonic integration

Up to 170Gbaud Optical Interconnects with Integrated CMOS-Silicon Photonics Transmitter

A monolithic 56 Gb/s silicon photonic pulse-amplitude modulation transmitter

Demonstration of Cost-Effective Single-Photodetector Coherent Receiver for Free-Space Optical Communications

A Compact 112-Gbaud PAM-4 Silicon Photonics Transceiver for Short-Reach Interconnects

Beyond 100-Gb/s Direct-detection Transmission Using an Optical Receiver Co-integrated with a 28-Nm CMOS Gain-tunable Fully-differential TIA

Real-Time Demonstration of Homodyne Coherent Bidirectional Transmission for Next-Generation Data Center Interconnects

1.6 Tbps Silicon Photonics Integrated Circuit and 800 Gbps Photonic Engine for Switch Co-Packaging Demonstration

Wdm Module Research Within The Canadian Solid State Optoelectronics Consortium

8-λ × 50 Gbps/λ Heterogeneously Integrated Si-Ph DWDM Transmitter

A 256 Gbps Heterogeneously Integrated Silicon Photonic Microring-based DWDM Receiver Suitable for In-Package Optical I/O

First Demonstration of Net-1.6-Tbps 4λ-WDM in 150-GHz-Grid IM/DD Transmission with a Single DAC/channel and Advanced DSP for Intra-Datacenter-Interconnects.

Demonstration of a 5 Gb/s × 24 interchip optical interconnect system

Silicon Photonic Microring-Based 4 × 112 Gb/s WDM Transmitter With Photocurrent-Based Thermal Control in 28-nm CMOS

40Gbps Optical Receiver Based on Germanium Waveguide Photodetector Hybrid-Integrated with 90nm CMOS Amplifier

Numerical Demonstration of 800 Gbps WDM Silicon Photonic Transmitter with Sub-Decibel Surface-Normal Optical Interfaces