Modeling and Performance Analysis of Semiconductor Manufacturing Systems.

MD Jeng,XL Xie
DOI: https://doi.org/10.1109/icsmc.1998.725487
1998-01-01
Abstract:It is difficult to conduct performance evaluation of shared-resource manufacturing systems because of the complex behaviour. We propose a method for evaluating the performance of prioritized processes with shared resources modeling a class of semiconductor manufacturing systems. Markovian timed Petri nets are first used to represent systems with process priorities, routing priorities, resource re-entrance and nonpreemptive operations. Uniformization technique is then used to established both lower and upper bounds of the performance of interest. These bounds are computable using linear programming.
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