Modeling, Analysis and Simulation of Cluster Tools for Semiconductor Manufacture Using Timed Color Petri Nets

GONG Xiao-fan,WU Zhi-ming
DOI: https://doi.org/10.3969/j.issn.1006-9348.2007.12.066
2007-01-01
Abstract:Cluster tools are the critical equipment for semiconductor manufacture,and usually,the bottleneck equipment.Intuitionistic performance quantitive analysis is significant to the production efficiency analysis and cost prediction.This article proposed a detailed process on how to build timed color Petri nets model of single-robot dual-chamber cluster tools using CPN Tools developed by University of Aarhus.Two models of one cluster tools were built using abstract and non-abstract logic structures.Finally two models based on different logic structures were compared to get a simulation result by running the model in CPN Tools.The methodology and result in this article can be a guide for the modeling and analysis of complicated cluster tools using timed color Petri nets.
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