Architecture of a Post-Opc Silicon Verification Tool

XL Yan,Y Chen,Z Shi,ZJ Chen
DOI: https://doi.org/10.1109/icasic.2003.1277471
2003-01-01
Abstract:With the wider usages of OPC and PSM technologies in current UDSM IC manufacturing, a new step of verifying the layout modifications is needed. Reasons to employ such a step are discussed in this paper. The architecture of a post-OPC silicon verification tool which has the full capability to accomplish such a verification task is presented in detail. Process modelling and some accelerating algorithms implemented in this tool are detailed as well. Real verification examples are also demonstrated.
What problem does this paper attempt to address?