Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

Terahertz Absorption Characteristics of Nickel-Chromium Film in A Microbolometer Focal Plane Array

Terahertz Absorption Characteristics of NiCr Film and Enhanced Absorption by Reactive Ion Etching in a Microbolometer Focal Plane Array

Study on Optical Properties of Nanostructured NiCr Film Prepared by Magnetron Sputtering and RIE for Terahertz Applications

Enhanced infrared absorption of NiCr Film fabricated on LiTaO3 crystal material for 14 similar to 16 mu m application

Enhanced infrared absorption of NiCr Film fabricated on LiTaO3 crystal material for 14 ～ 16 μm application

High Performance Terahertz Absorption of Nanostructured NiCr Film for a Pyroelectric Detector

Preparation Of Nanostructured Nicr Film As A Terahertz Absorption Layer By Magnetron Sputtering And Rie

Nb 5 N 6 Thin Film on Silicon and Silicon Oxide: A Good Material for Terahertz Detection

Influence of Reactive Ion Etching on Thz Transmission and Reflection Properties of Nicr Film Deposited on A Dielectric Substrate

FILM THICKNESS INFLUENCES ON THE THERMOELECTRIC PROPERTIES OF NiCr/NiSi THIN FILM THERMOCOUPLES

Detection Of Terahertz Radiation Using Improved Uncooled Focal Plane Array Detector

Absorption Enhancement of Terahertz Wave in Microbolometers by Titanium Disk Array

An Nb5N6 Microbolometer THz Camera

Byh Study On Infrared Absorption Of Tungsten Nanofilm

Influence of Substrate Thickness on the Responsivity of Antenna-Coupled Thz Microbolometers

Infrared enhanced absorption of TiNx nano films.

Antenna-coupled Uncooled Nb5N6microbolometers for Terahertz Imaging

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

Enhancement of Real-Time THz Imaging System Based on 320 × 240 Uncooled Microbolometer Detector

Thin Film Like Terahertz Bolometric Detector on Bi2212 Single Crystal

Thin-film IR Absorbers with High Absorbance and Easy Preparation and Integration