Byh Study On Infrared Absorption Of Tungsten Nanofilm

Xiaoxiong Zhou,Andi Zhao,Mingquan Yuan,Xiaomei Yu
DOI: https://doi.org/10.1117/12.911878
2011-01-01
Abstract:Thin metallic films have several potential applications in MEMS field, and one of them is used as infrared absorber. In this paper, we first build a model of metallic infrared absorption and then discuss the transmission characteristics of infrared through metal and dielectric film. For a thin film material, the maximum absorption will occur when its sheet resistance equals to the impedance of free space. In order to verify the absorption property, tungsten (W) nanofilms with different thicknesses have been deposited and their characteristics of infrared absorption were experimentally studied. The infrared absorbance of W nanofilms increased as the thickness of the films increased; more than 50% IR radiation could be absorbed by W nanofilms at the wavelength of 8-12 mu m.
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