Microwave Plasma Jets Excitated With Low Power

pei liu,ming chen,junfeng chen,zhen zheng,fu guo,minghai liu
DOI: https://doi.org/10.1109/TPS.2014.2343254
2014-01-01
Abstract:Plasma jet provides an effective mode for many potential industrial applications. Microwave plasma jet excitated by surface plasmon polaritons is displayed under different operational conditions. Images of the observed plasma jets are presented. Ar, N2, and air are chosen as the feed gases. Incident microwave power of 5, 15, 30, and 50 W is used, and the longest length of plasma jet is 300 mm for argon under the pressure of 63 Pa.
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