Abstract:Recent decades have seen significant advancements in integrated photonics, driven by improvements in nanofabrication technology. This field has developed from integrated semiconductor lasers and low-loss waveguides to optical modulators, enabling the creation of sophisticated optical systems on a chip scale capable of performing complex functions like optical sensing, signal processing, and metrology. The tight confinement of optical modes in photonic waveguides further enhances the optical nonlinearity, leading to a variety of nonlinear optical phenomena such as optical frequency combs, second-harmonic generation, and supercontinuum generation. Active tuning of photonic circuits is crucial not only for offsetting variations caused by fabrication in large-scale integration, but also serves as a fundamental component in programmable photonic circuits. Piezoelectric actuation in photonic devices offers a low-power, high-speed solution and is essential in the design of future photonic circuits due to its compatibility with materials like Si and Si3N4, which do not exhibit electro-optic effects. Here, we provide a detailed review of the latest developments in piezoelectric tuning and modulation, by examining various piezoelectric materials, actuator designs tailored to specific applications, and the capabilities and limitations of current technologies. Additionally, we explore the extensive applications enabled by piezoelectric actuators, including tunable lasers, frequency combs, quantum transducers, and optical isolators. These innovative ways of managing photon propagation and frequency on-chip are expected to be highly sought after in the future advancements of advanced photonic chips for both classical and quantum optical information processing and computing.

Optical Control and Tuning of Thermal-Piezoresistive Self-Sustained Oscillators

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Frequency‐sensitive Switching Control Effect Induced by Two‐photon Resonance in an EIT‐based Layered Medium

Arbitrary electro-optic bandwidth and frequency control in lithium niobate optical resonators

A Tunable Optoelectronic Oscillator Based on a Dispersion-Induced Microwave Photonic Filter

Ultralow‐Power Piezo‐Optomechanically Tuning on CMOS‐Compatible Integrated Silicon‐Hafnium‐Oxide Platform (Laser Photonics Rev. 17(2)/2023)

On-chip Kerr parametric oscillation with integrated heating for enhanced frequency tuning and control

Piezoelectric actuation for integrated photonics

All-optical thermal control for second-harmonic generation in an integrated microcavity

Optical Control of Nanomechanical Eigenfrequencies and Brownian Motion in Metamaterials

Mode Selection Behavior of VHF Thermal-Piezoresistive Self-Sustained Oscillators

Temperature Tunable Infrared Optical Parametric Oscillator with Periodically Poled LiNbO3

Low-Power Photothermal Self-Oscillation of Bimetallic Nanowires

High-precision spectral tuning of micro and nanophotonic cavities by resonantly enhanced photoelectrochemical etching

Wavelength Tracking with Thermally Controlled Silicon Resonators

Cooling Mechanical Oscillators by Coherent Control

Infrared OPO Temperature Tuning Based on Periodically-Poled Lithium Niobate

Longitudinal piezoelectric resonant photoelastic modulator for efficient intensity modulation at megahertz frequencies

Photoinduced tunability of the Reststrahlen band in 4H-SiC