High-performance micronano-photonic devices enabled by laser nanofabrication

Hong-Bo Sun

2014-01-01

Abstract:We have performed systematic investigations on the fabrication of micro/nano structure in organic optoelectronic devices by laser nanofabrication technique and their effects on improving the device performance.

What problem does this paper attempt to address?

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Minfei He,Zhimin Zhang,Chun Cao,Yiwei Qiu,Xiaoming Shen,Guozun Zhou,Zixin Cai,Xinjie Sun,Xin He,Liang Xu,Xi Liu,Chenliang Ding,Yaoyu Cao,Cuifang Kuang,Xu Liu

DOI: https://doi.org/10.1186/s43074-022-00072-2

IF: 16.5

2022-01-01

PhotoniX

Abstract:Advances in direct laser writing to attain super-resolution are required to improve fabrication performance and develop potential applications for nanophotonics. In this study, a novel technique using single-color peripheral photoinhibition lithography was developed to improve the resolution of direct laser writing while preventing the chromatic aberration characteristics of conventional multicolor photoinhibition lithography, thus offering a robust tool for fabricating 2D and 3D nanophotonic structures. A minimal feature size of 36 nm and a resolution of 140 nm were achieved with a writing speed that was at least 10 times faster than existing photoinhibition lithography. Super-resolution and fast scanning enable the fabrication of spin-decoupled metasurfaces in the visible range within a printing duration of a few minutes. Finally, a subwavelength photonic crystal with a near-ultraviolet structural color was fabricated to demonstrate the potential of 3D printing. This technique is a flexible and reliable tool for fabricating ultracompact optical devices.
Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Min Wang,Zhiwei Fang,Jia Qi,Junxia Zhou,Zhe Wang,Rongbo Wu,Renhong Gao,Ni Yao,Sanaul Haque,Saeed Farajollahi,Jintian Lin,Wei Fang,Tao Lu,Wei Chu,Ya Cheng

DOI: https://doi.org/10.1117/12.2585248

2021-01-01

Abstract:We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.
Laser Micronanostructuing For High-Performance Organic Optoelectronic Devices

Hong-Bo Sun

DOI: https://doi.org/10.1364/cleo_at.2014.atu2l.3

2014-01-01

Abstract:We report series of work on multi-beam interference ablation of organic materials, by which problems like extract efficiency and view angle in OLED were solved. The devices are promising for high-efficiency and long-life time display.We report series of work on multi-beam interference ablation of organic materials, by which problems like extract efficiency and view angle in OLED were solved. The devices are promising for high-efficiency and long-life time display.
Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Min Wang,Jintian Lin,Yingxin Xu,Zhiwei Fang,Lingling Qiao,Z. Liu,Wei Fang,Ya Cheng

DOI: https://doi.org/10.1016/j.optcom.2016.05.025

IF: 2.4

2017-01-01

Optics Communications

Abstract:Femtosecond laser micromachining has been a promising technique for fabricating three-dimensional (3D) micro/nano-structures in various kinds of dielectric materials with unprecedented spatial resolutions as well as flexibility in terms of the geometry and the materials can be processed. This unique capability opens opportunities for fabrication of 3D high-quality (Q) microresonators, which are one of the key elements in modern photonic applications. Here, we review the recent progress in fabrication of high-Q microresonators on glass and crystalline substrates by employing femtosecond laser direct writing. We demonstrate the applications of the fabricated microresonators in generating low-threshold lasers, high-sensitivity chemical sensing and nonlinear optical wavelength conversion.
Laser Nanofabrication for Advanced Devices in Versatile Fields

Hong-Bo Sun

DOI: https://doi.org/10.1364/ltst.2012.mth5c.1

2012-01-01

Abstract:This talk will review the recent research progress on laser nanofabrication conducted in our laboratory. Particular emphasis will be placed on realization of biomaterials such as protein microdevices, microfluidic and biomimetic devices.
Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Chen, Qi-Dai,Xia, Hong,Yong-Lai Zhang,Sun, Hong-Bo

DOI: https://doi.org/10.1109/cleoe.2011.5943341

2011-01-01

Abstract:Femtosecond laser micronanofabrication has been considered as a promising approach for complicated device fabrication in versatile fields due to its intrinsic three-dimensional (3D) prototyping capability and reasonably high fabrication accuracy up to tens of nanometers. However, the unique features haven't been fully demonstrated yet so far. Our research in the passed several years has been focused in exploring applications of delicate technology in micro-optics, microelectronics, micromachines and microfluidics. Significant progress has been achieved. Successful examples include but not limited to aspheric microlens arrays with 100% filling ratio and numerical aperture as high as 0.5, nonplanar metal nanowiring technology, flexible circuits of graphene, remotely magnetically controllable micromachine, and microfilter and microturbines for microfluidic channels. Details on the fabrication and characterizations on these devices will be presented.
Nanostructured Plasmonic Devices and Their Applications

Min Qiu,Qiang Li,Weichun Zhang,Lijun Meng,Ding Zhao,Xi Chen,Yiting Chen,Min Yan

DOI: https://doi.org/10.1109/icait.2013.6621503

2013-01-01

Abstract:In this talk, we will review our recent works on nanostructured plasmonic devices, and their applications in high performance light absorption, photothermal effects, and partly in photonic integrations.
Micro-/Nano-Structures Fabricated by Laser Technologies for Optoelectronic Devices

Jian Yi,Hao Zhou,Wei-Hua Wei,Xing-Chen Han,Dong-Dong Han,Bing-Rong Gao

DOI: https://doi.org/10.3389/fchem.2021.823715

IF: 5.5

2021-12-16

Frontiers in Chemistry

Abstract:Due to unique optical and electrical properties, micro-/nano-structures have become an essential part of optoelectronic devices. Here, we summarize the recent developments in micro-/nano-structures fabricated by laser technologies for optoelectronic devices. The fabrication of micro-/nano-structures by various laser technologies is reviewed. Micro-/nano-structures in optoelectronic devices for performance improvement are reviewed. In addition, typical optoelectronic devices with micro-nano structures are also summarized. Finally, the challenges and prospects are discussed.

chemistry, multidisciplinary
The Fabrication of Micro/Nano Structures by Laser Machining

Liangliang Yang,Jiangtao Wei,Zhe Ma,Peishuai Song,Jing Ma,Yongqiang Zhao,Zhen Huang,Mingliang Zhang,Fuhua Yang,Xiaodong Wang

DOI: https://doi.org/10.3390/nano9121789

IF: 5.3

2019-12-16

Nanomaterials

Abstract:Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
Creation of a Micro-Nanoworld with Photons

Satoshi Kawata,Hong-Bo Sun

DOI: https://doi.org/10.4325/seikeikakou.17.524

2005-01-01

Abstract:Compared with synthesis of nanomaterials, fabrication of structures with nano-scale feature size is more challenging. Laser micro-nanofabrication has appeared as a versatile approach to reach this end due to its intrinsic three-dimensional (3D) processing capability and sub-100 nm spatial resolution. Different from conventional planar UV lithography widely used in the semiconductor industry, a technology based on pattern definition by photomask and linear exposure of resists, the ３D laser approach relies on light-matter nonlinear interactions and directly depicts complex patterns in three dimensions. Considering that compositions of various performances could be induced into photopolymers or transparent solids used for the fabrication, the technology as a new generation high precision manufacturing tool, is quite promising for ３D functional micronanophotonic, optoelectronic and mechanical devices and their integrated systems.
Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Lili Zhao,Zhen Liu,Duo Chen,Fan Liu,Zhiyuan Yang,Xiao Li,Haohai Yu,Hong Liu,Weijia Zhou

DOI: https://doi.org/10.1007/s40820-020-00577-0

2021-01-01

Abstract:Abstract Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical purposes. In the past decade, laser as a synthetic technique and laser as a microfabrication technique facilitated nanomaterial preparation and nanostructure construction, including the laser processing-induced carbon and non-carbon nanomaterials, hierarchical structure construction, patterning, heteroatom doping, sputtering etching, and so on. The laser-induced nanomaterials and nanostructures have extended broad applications in electronic devices, such as light–thermal conversion, batteries, supercapacitors, sensor devices, actuators and electrocatalytic electrodes. Here, the recent developments in the laser synthesis of carbon-based and non-carbon-based nanomaterials are comprehensively summarized. An extensive overview on laser-enabled electronic devices for various applications is depicted. With the rapid progress made in the research on nanomaterial preparation through laser synthesis and laser microfabrication technologies, laser synthesis and microfabrication toward energy conversion and storage will undergo fast development.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Dong Jiang Wu,Juan Zhuang,Xu Yue Wang,Ren Ke Kang,Fu Ling Zhao

DOI: https://doi.org/10.4028/www.scientific.net/KEM.329.415

2007-01-01

Key Engineering Materials

Abstract:We have developed the laser nanoprocessing technique by the integration of the fs laser and near-field scanning microscopy (NSOM). The second harmonic femtosecond laser working in the optical near-field with the assistance of NSOM equipment was applied to expose the photosensitive polymer material. The nanopatterns with feature size smaller than the laser wavelength can be fabricated. The optical diffraction limitation is therefore broken through by the near-field nanoprocessing. It was found in our experiment that the nanofabrication feature size depends strongly on the gap between the fiber probe tip and the substrate surface, as well as the laser coupling efficiency. The approach offers the advantages of high precision, speed and selectivity in nanopatterning, and is promising to be used in data storage device manufacture for higher density recording.
Innovative Nano-Optical Devices, Integration And Nano-Fabrication Technologies

Jj Wang,Xg Deng,L Chen,P Sciortino,Jd Deng,F Liu,A Nikolov,A Graham,Yl Huang

DOI: https://doi.org/10.1117/12.580102

2005-01-01

Abstract:We developed various optical devices and integrated optical devices based on innovative nano-optical structures and design. The nano-optical devices and integrated devices were fabricated through a nano-manufacturing platform based on wafer level nano-replication with mold and nano-pattern transfer by nano-lithography. The nano-replication process, which based on imprinting a single-layer spin-coated UV curable resist, achieved excellent nano-patterning fidelity and on-wafer uniformity with high-throughput. Excellent wafer level performance and yield were achieved. Nano-optic devices, such as, quarter wave plates and polarizers, and integrated nano-optical devices, such as monolithically integrated semi-isolators, were manufactured with the nano-manufacturing platform. The developed technology is suitable for high-throughput and low cost manufacturing needs for commercializing nano-structure based optical devices and integrated optical devices.
Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding

Rana Asgari Sabet,Aqiq Ishraq,Alperen Saltik,Onur Tokel

DOI: https://doi.org/10.48550/arXiv.2302.13105

2023-02-25

Optics

Abstract:Nano-fabrication in silicon, arguably the most important material for modern technology, has been limited exclusively to its surface. Existing lithographic methods cannot penetrate the wafer surface without altering it, whereas emerging laser-based subsurface or in-chip fabrication remains at > 1 micrometer resolution. In addition, available methods do not allow positioning or modulation with sub-micron precision deep inside the wafer. The fundamental difficulty of breaking these dimensional barriers are two-fold, i.e., complex nonlinear effects inside the wafer and the inherent diffraction limit for laser light. Here, we overcome these challenges by using structured-laser-beams and exploiting preformed subsurface structures as seed, in order to establish the first controlled nano-fabrication capability inside silicon. We demonstrate buried nano-structures of feature sizes down to 100 nm +- 25 nm, with sub-wavelength and multi-dimensional control; thereby improving the state-of-the-art by an order-of-magnitude. In order to showcase the photonic capabilities, we fabricated the first in-chip nano-photonic elements, i.e., nano-gratings with record diffraction efficiency and spectral control. The reported advance is an important step towards in-chip nano-photonic systems, micro-/nano-fluidics & NEMS/MEMS, and 3D electronic-photonic integration.
Progress on Ultrafast Laser Lithography of Large-Scale Lithium Niobate Integrated Photonics

Jinxin Huang,Jinming Chen,Zhaoxiang Liu,Lvbin Song,Guanhua Wang,Chao Sun,Rongbo Wu,Jintian Lin,Zhiwei Fang,Haisu Zhang,Zhe Wang,Jia Qi,Min Wang,Ya Cheng

DOI: https://doi.org/10.1360/tb-2023-0860

2024-01-01

Abstract:The combination of advanced functional materials with high optical performance and cutting-edge micro/nano fabrication technology has ushered in a new era for integrated photonics. Thin-film lithium niobate (TFLN) has emerged as a promising material platform for the next generation photonic integrated circuits (PICs), owing to its wide transparency window from UV to mid-IR, moderately high refractive index that enables dense photonic integration while maintaining a suitable mode-size in the single-mode lithium niobate (LN) ridge waveguide, and large electro-optic (EO) as well as nonlinear optical coefficients which are critical for high-speed EO tuning and high-efficiency wavelength conversion applications. Photolithography assisted chemo-mechanical etching (PLACE), a technique developed specifically for fabricating high quality (high-Q) large-scale PICs on TFLN, has enabled fabrication of a series of building blocks of PICs ranging from high-Q micro-resonators and low-loss waveguides to waveguide amplifiers, arrayed waveguide grating (AWG) and electro optically tunable/programmable photonic circuits, showing high optical performance, such as, 1.2 x 108-ultra-high-Q micro-resonator, 0.025-dB/cm ultra-low-loss continuously tunable delay line, 20-dB gain waveguide amplifier and 1.5-mW total power consumption matrix operation devices. Aiming at high-throughput manufacturing of the PIC devices and systems, we have developed an ultra-high-speed high-resolution laser lithography fabrication system employing a high repetition-rate femtosecond laser and a high-speed polygon laser scanner, achieving infinite field of vision (IFOV) processing, by which a lithography fabrication efficiency of 4.8 cm(2)/h has been achieved at a spatial resolution of 200 nm. Using the high-speed femtosecond laser lithography system, we successfully fabricate photonic structures of large footprints with reasonable propagation loss. By combining the previous femtosecond scan scheme for smoothing mask edges with a high-speed polygon scan scheme for patterning the waveguide groove part, we further improve the propagation loss. We also demonstrate wafer-scale fabrication of microelectrode structures, showing high uniformity in the fabrication process, and high-speed Mach-Zehnder interferometer (MZI) modulators. By characterizing EO performance of the MZI modulator, we achieve a voltage-length product of 1.86 V cm and a measured 3-dB bandwidth up to 70 GHz. With the continuous advances in the high-repetition-rate femtosecond laser, high-speed electronic shutter/ controller and high-speed host data transmission technology, we expect the fabrication efficiency and propagation loss can be further promoted by 1-2 orders of magnitude. This will have a profound implication as miniaturization will play a central role in future society.
Surface Nano-fabrication by Laser Precision Engineering

Minghui HONG,Chin Seong LIM,Yi ZHOU,Leng Seow TAN,Luping SHI,Tow Chong CHONG

DOI: https://doi.org/10.2184/lsj.36.1184

2008-01-01

Abstract:Research progress on laser nano-fabrication with the combination of AFM, NSOM and transparent particles mask is reviewed. With the combination of other advanced processing tools, laser irradiation can push the processing feature size down to ~ 20 nm. However, laser nano-fabrication with single optics brings about the technical challenge of slow processing speed. Parallel laser nano-patterning was recently developed to achieve large area and high speed nano-fabrication with laser irradiation through a micro-lens array. Laser interference lithography is also studied to fabricate 100 nm functional periodic nanostructures on substrate surfaces.
Research progresses of novel optical effects in artificial micro/nano-structures

Tao Li,Shining Zhu

DOI: https://doi.org/10.16262/j.cnki.1000-8217.2017.04.005

2017-01-01

Abstract:Based on the achievements of NSFC Innovative Team Program-"Study on Novel Optical Effects in Artificial Micro/nano-Structures",this article systematically reviews the progresses in the researches of photonic on-chip integration,micro/nano optical field manipulation,coherent processes in quantum confined system,and new-type energy photonic materials and devices,and briefly introduces the development of optical superlattice based solid state lasers and their applications.
Three-Dimension Micro-Nanofabrication with A Femtosecond Laser

Hong-Bo Sun,Satoshi Kawata

DOI: https://doi.org/10.1117/12.694288

2006-01-01

Abstract:The light is the ultimate energy source for the life on the earth and also it is with the help of light that we see and understand the world surrounding us. The energy quanta are called photons. In addition to illuminating, imaging and spectroscopy, a typical example of the recent uses of photons in our daily life is optical communication. A more and more important new role that photons are playing is manufacturing, particularly in three-dimensional micro-nanofabrication on the basis of nonlinear photon-matter interactions. This article reports our recent progress in this research direction: the challenge to the spatial resolution of fabrication, and the utilization of the technology on nanophotonic and micro-nanomechanical devices.
Micro-Fabrication By Femtosecond Laser Pulses

Yudong Li,Jianguo Tian,Qian Sun

DOI: https://doi.org/10.1117/12.674220

2006-01-01

Abstract:Optical microstructures are very important for the realization of multifunctional optics and photonics devices. In the last decade, with the development of commercial ferntosecond laser, it has been proven that micro-structuring with ferntosecond laser pulses is an excellent tool for free design micro-fabri cation of almost all kinds of materials. With the filament, spatially scanning and other methods, many types of 0 to 3-dimensional optical microstructures, including optical memory, waveguides, gratings, couplers and photonic crystals, were produced successfully inside a wide variety of transparent materials of solid state and also liquid state. Here we reviewed the proceeding of the micro-fabrication technology by femtosecond laser pulses in the last few years.
Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs

Bin-Bin Xu,Hong Xia,Qi-Dai Chen,Yong-Lai Zhang,Hong-Bo Sun

DOI: https://doi.org/10.1109/cleopr.2013.6600173

2013-01-01

Abstract:As a powerful 3D processing tool, femtosecond laser fabrication shows great potential to prototype various micronanostructures towards a wide range of applications. Herein, we introduced the nanofabrication of high-performance microfluidic chip through integrating functional components.

High-performance micronano-photonic devices enabled by laser nanofabrication

Single-color Peripheral Photoinhibition Lithography of Nanophotonic Structures

Advancing Integrated Photonics and Microreactor Technologies with Ultrafast Laser Processing

Laser Micronanostructuing For High-Performance Organic Optoelectronic Devices

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Laser Nanofabrication for Advanced Devices in Versatile Fields

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Nanostructured Plasmonic Devices and Their Applications

Micro-/Nano-Structures Fabricated by Laser Technologies for Optoelectronic Devices

The Fabrication of Micro/Nano Structures by Laser Machining

Creation of a Micro-Nanoworld with Photons

Laser Synthesis and Microfabrication of Micro/Nanostructured Materials Toward Energy Conversion and Storage

Nano-Structures Fabrication by Laser Combined with Near-Field Scanning Optical Microscopy

Innovative Nano-Optical Devices, Integration And Nano-Fabrication Technologies

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding

Progress on Ultrafast Laser Lithography of Large-Scale Lithium Niobate Integrated Photonics

Surface Nano-fabrication by Laser Precision Engineering

Research progresses of novel optical effects in artificial micro/nano-structures

Three-Dimension Micro-Nanofabrication with A Femtosecond Laser

Micro-Fabrication By Femtosecond Laser Pulses

Integrating Functional Components into Microfluidic Channels by Laser Nanofabrication Technologies Toward High-Performance Locs