Abstract:The study of optical microcavity sensors in current micro optical electro mechanical systems (MOEMS) devices is an important research direction in this field. This study investigates a new type of nanocavity temperature sensor based on the S-shaped metal-insulator-metal (MIM) and Bragg grating. The analysis of the original sensor model shows that the resonance wavelength of the proposed grating's reflection spectrum shifts to the long-wave direction with the change of refractive index. The value of the high refractive index sensitivity is 1960 nm/RIU, which is obtained near the Bragg resonance wavelength of 1950 nm, and the figure of merit (FOM) is 14.6. The structure is further optimized by adding nanocavity in the middle of the S-shaped MIM Bragg grating. Results show that the refractive index sensitivity is basically unchanged, but the corresponding FOM is 27.7, showing an improvement of 89.7%. The temperature sensor sensitivity is as high as 4.95 nm/degrees C, and the reflection spectrum resonance wavelength of the proposed grating shifts to the short-wave direction as the temperature changes. High sensitivity can be obtained when the Bragg resonance wavelength is long. Moreover, the Bragg wavelength has a good linear relationship with external physical parameters, such as refractive index and temperature. The findings of this study have certain theoretical and practical values in realizing high-precision, anti-harsh environment, and multi-sensor integrated MOEMS devices.

A Plasmonic Refractive Index Sensor Based on A Mim Waveguide with A Side-Coupled Nanodisk Resonator

The Sensing Characteristics of Plasmonic Waveguide with a Ring Resonator.

Highly Sensitive Plasmon Refractive Index Sensor Based on MIM Waveguide

Theoretical Investigation of a Plasmonic Sensor Based on a Metal–insulator–metal Waveguide with a Side-Coupled Nanodisk Resonator

Index Sensing Characteristics of the Plasmonic Sensor Based on Metal-Insulator-metal Waveguide-Coupled Structure

A MIM Waveguide Structure of a High-Performance Refractive Index and Temperature Sensor Based on Fano Resonance

A Novel Plasmonic Sensor Based on Metal–Insulator–Metal Waveguide with Side-Coupled Hexagonal Cavity

A Symmetric MIM Waveguide Structure of a High-Sensitivity Refractive Index Sensor

A High-Sensitivity Refractive-Index Sensor Based on Plasmonic Waveguides Asymmetrically Coupled with A Nanodisk Resonator

A Plasmonic Structure of Fano Resonance in the MIM Waveguide with r-Shaped Resonator for Refractive Index Sensor

A High-Sensitivity Refractive Index Nano-Sensor Structure Based on MIM Waveguide

Refractive Index Sensor Based on the Fano Resonance in Metal–Insulator–Metal Waveguides Coupled with a Whistle-Shaped Cavity

Numerical Analysis of a Novel Higher Power Refractive Index Sensor Based on MIM Waveguide Structure

Fano Resonance in the Plasmonic Structure of MIM Waveguide with r-Shaped Resonator for Refractive Index Sensor

Sense High Refractive Index Sensitivity with Bragg Grating and MIM Nanocavity

Plasmonic Refractive Index Sensor with High Figure of Merit Based on Concentric-Rings Resonator

Plasmonic Multichannel Refractive Index Sensor Based on Subwavelength Tangent-Ring Metal–Insulator–Metal Waveguide

Nanoscale Temperature Sensors Based on MIM Waveguide Coupling and Ring-Embedded Nanostructures

A dual-purpose sensor with a sawtooth U-shaped cavity and a rectangle-shaped cavity in a MIM waveguide structure

Temperature Sensor of MoS2 Based on Hybrid Plasmonic Waveguides

A Window-Shaped Resonator Nanostructure Based on an MIM Waveguide for Refractive Index Sensing