Corrigendum: Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water

Rui Xu,Zhongchao Zhou,Jing Li,Xu Zhang,Yuanyuan Zhu,Hongping Xiao,Lina Xu,Yihong Ding,Aidong Li,Guoyong Fang
DOI: https://doi.org/10.3389/fchem.2022.1118819
IF: 5.5
2022-12-20
Frontiers in Chemistry
Abstract:[This corrects the article DOI: 10.3389/fchem.2022.1035902.].
chemistry, multidisciplinary
What problem does this paper attempt to address?