Observation of hot electrons in surface-wave plasmas excited by surface plasmon polaritons

Yelin Hu,Zhaoquan Chen,Minghai Liu,Lingli Hong,Ping Li,Xiaoliang Zheng,Guangqing Xia,Xiwei Hu
DOI: https://doi.org/10.1088/0256-307X/28/11/115201
2011-01-01
Chinese Physics Letters
Abstract:The electron energy distribution functions (EEDFs) are studied in the planar-type surface-wave plasma (SWP) caused by resonant excitation of surface plasmon polaritons (SPPs) using a single cylindrical probe. Sustained plasma characteristics can be considered as a bi-Maxwellian EEDF, which correspond to a superposition of the bulk low-temperature electron and the high-energy electron beam-like part. The beam component energy is pronounced at about 10 eV but the bulk part is lower than 3.5 eV. The hot electrons included in the proposed plasmas play a significant role in plasma heating and further affect the discharge chemistry.
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