Abstract:This paper proposes a bulk micromachined bandpass filter on 0.5mm-thick Pyrex glass, whose operation is based on the splitting of the odd and even degenerate mode in a dual-mode resonator, with the addition of a perturbation element. In such a way, a filter may require only half resonators of a traditional one, resulting in a more compact configuration over those ever reported. A 4%-bandwidth bandpass filter centered at 17GHz was designed. The square-ring-like coplanar waveguide (CPW) act as a dual-mode resonator, and an open-circuited stub attached to the inner corner of the square-ring acts as the perturbation element and dominates the filter bandwidth. The two bulk-micromachined switches for tuning are placed symmetrically along the diagonal line. Since the electrical length of CPW is extended after being loaded by capacitive switches, both the degenerate resonating frequencies and the filter mid-band frequency are shifted downward. Theoretical formulas are derived for various actuation states of all the switches. The filter performance is analysed also using finite-element fullwave tools. A frequency shift of 0.6GHz is seen which is close to 0.58GHz obtained from analytical solutions. Both the original and tuned state come with satisfying microwave performance, i.e. low passband insertion-loss (< 0.5dB) and return-loss (< −15dB) and high stopband rejection. It is also shown that the simulated result is in good agreement with theoretical solutions. The bulk microfabrication is shown to be much simpler than surface micromachining conventionally used for RF MEMS switches. Since the bridge skeleton is Si, thermal mismatch between all-metal bridge and dielectric substrate is avoided, and reliability at elevated temperature is guaranteed or at least greatly improved. Besides, the p++ doped Si line patterned simultaneously with the microbridges, can also be used as a DC biasing resistor, which can eliminate the additional steps to fabricate the resistive alloy line. The tested results of the fabricated switch samples are also shown. The device may be a good candidate for novel Ku-band inter-scientific satellite communication or wireless networking.

Tunable and Switchable Bandpass Filters Using Slot-Line Resonators

3D Heterogenous Integrated Wideband Switchable Bandpass Filter Bank for Millimeter Wave Applications

A Miniaturized Dual‐mode Zeroth‐order Ring Bandpass Filter with One Left‐handed Unit and a Capacitive Stub

Substrate-Integrated Waveguide Bandpass Filters with Planar Resonators for System-on-Package

Compact dual-band bandpass filter using asymmetrical dual stub-loaded open-loops

A Modified Dual-Mode Bandpass Filter Using Inductively Slotted Square Resonator Without Coupling Gaps

Extended Doublet Bandpass Filters Implemented with Microstrip Resonator and Full-/Half-Mode Substrate Integrated Cavities

Design of a Miniaturized Dual-Band Double-Folded Substrate Integrated Waveguide Bandpass Filter with Controllable Bandwidths

A Tri-Band Filter Using Tri-Mode Stub-Loaded Resonators (Slrs)

Novel Bandpass Filters by Using Cavity-Loaded Dielectric Resonators in A Substrate Integrated Waveguide

Collaborative Design of a New Dual-Bandpass 180 Hybrid Coupler

A Flat-Passband Microstrip Filter With Nonuniform- $Q$ Dual-Mode Resonators

Miniaturized Dual-Band Bandpass Filter Using &#x03bb;/2 Spiral-Resonator and Loaded Open-Stub

Design of compact dual-band switchable bandpass filter

Reconfigurable Bandpass Filter With Multi-Band Switching and Band Shiftability

Tunable Bandpass Filter Using a Switched Tunable Diplexer Technique.

Design of high selectivity tunable bandpass filter with switchable single‐/dual‐band responses

Dual-band bandpass filter using centrally coupled resonators (CCRs)

Design optimization of band-pass filter based on parity-time symmetry coupled-resonant

High-Selective Bandpass Filters Based on New Dual-Mode Rectangular Strip Patch Resonators

A Bulk Micromachined Tunable Dual-Mode Microwave Bandpass Filter on Coplanar Waveguide