Abstract:Considering the changes of the zero bias of a silicon-based MEMS accelerometer at different environmental temperatures,a new type of compensation circuit was designed. Theoretical analysis and experimental tests showed that there was a significant linearity between resonant frequency and temperature. The resonant frequency was propor-tional to the square root of elasticity modulus of elastic beam. Meanwhile,the temperature affected elasticity modulus in three main ways:the temperature effect of the elasticity modulus,thermal expansion and thermal stress. By means of Matlab numerical simulation,the relationship between resonant frequency and temperature was modeled and simu-lated,which well agreed with the experimental results. Based on the above study,a circuit with digital PLL module was designed for temperature compensation using FPGA. By identifying and locking the resonant frequency of the accelerometer,the resonant frequency worked as a symbol of temperature deviation so as to compensate zero bias drift. The result shows:after the compensation,the peak to peak temperature driftof the system decreases from 541.8,mg to 46.0,mg in the range from-30,℃ to 60,℃,meeting the requirements of some industrial applications.

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