Optimal Scheduling of Semiconductor Manufacture System Based on Improved Petri Net Model

SU Guo-jun,WANG Xiong-hai
2011-01-01
Systems Engineering - Theory & Practice
Abstract:In order to optimize the resources scheduling of semiconductor manufacturing system(SMS) more effectively,the hierarchical colored-timed Petri net(HCTPN)model based multi-phase optimal scheduling(MPOS)approach was proposed.Through the description enhancement and hierarchical idea for the basic Petri net,an improved Petri net model named HCTPN model was established,the HCTPN model can overcome the risk of model explosion of basic Petri net,and the scheduling place was embedded into the HCTPN model for the MPOS.At the same time,the MPOS was realized by dividing a production cycle into multi phases,the genetic algorithm(GA)was used to optimize the combination of integrated rules at each phase,the bottleneck machine groups were identified by their utilization rates,and the search efficiency of MPOS was improved by emphasizing the bottleneck machine groups through coding phase of GA.The results of simulation experiments verify the feasibility of the proposed strategy.
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