Effect of Hydrogen Concentration on Preparation of ZrC Coating by APCVD

李国栋,郑湘林,熊翔,孙威
DOI: https://doi.org/10.19476/j.ysxb.1004.0609.2010.09.021
2010-01-01
Abstract:Zirconium carbide(ZrC) coatings were prepared on carbon-carbon composites substrates by means of atmospheric pressure chemical vapor deposition(APCVD).ZrCl4-CH4-H2-Ar system was used in this deposition process.And the effect of different hydrogen concentration on coating properties was studied by X-ray diffractometry(XRD) and scanning electron microscopy(SEM).The mechanism of hydrogen in the deposition process was also studied.The results show that the coating phase composition,preferential growth and structure morphology change significantly as the hydrogen concentration increasing.With pure argon or less hydrogen,ZrC coating is porous,which is made up of ZrC and C two-phase,and is contained by lots of pyrocarbon.When the hydrogen concentration reaches more than 30%(volume fraction),there is only ZrC phase in the coating.When the hydrogen concentration reaches 90%,ZrC crystal preferential growth changes from(111) plane and(200) plane to intensive(220) plane,and the crystal morphology turns into nano-needle-like morphology.
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