Influence of Modulation Ratio on Structure and Properties of Nanoscale ZrB 2 /zraln Multilayered Coatings

DeJun Li,YuanBin Kang,Lei Dong,XiangYun Deng,Hao Liu,XueLiang Sun
DOI: https://doi.org/10.1007/s11431-009-0241-y
2010-01-01
Abstract:ZrB 2 /ZrAlN multilayered coatings with various modulation ratios ( t_ZrB_2 :t_ZrAlN ) and constant modulation periods were prepared by magnetron sputtering system at room temperature. SEM, XRD, surface profiler and nano-indenter were employed to investigate the influences of t_ZrB_2 :t_ZrAlN on the microstructure and mechanical properties of the coatings. Sharp interfaces and nanoscale multilayered modulation were confirmed by SEM. The multilayer with modulation period of 40 nm and ratio of 3:1 displayed the highest hardness (36.4 GPa) and critical fracture load (76.477 mN) with lower stress. The polycrystalline structure and multilayered modulate structure were directly responsible for the enhanced mechanical properties.
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