Simulation, Manufacturing and Testing of Micro Piezoelectric Power Generator

SUN Jian,LI Yigui,LIU Jingquan,YANG Chunsheng,HE Dannong
DOI: https://doi.org/10.3969/j.issn.1004-2474.2010.06.024
2010-01-01
Abstract:Basic working principle of micro cantilever piezoelectric vibration power generator was introduced to get its design criteria.A novel manufacturing process was adopted for bonding bulk PZT of high qualities and silicon die at 540 ℃ for 1 h,and was followed by lapping and dicing into desirable sizes.Finite element analysis software ANSYS was used to simulate the structure of device to get its natural frequency,frequency response of tip displacement and output voltage.A testing system of vibration power generator was set up to test the prototype.Test results showed that,the natural frequency of our device was about 2 580 Hz,and the output peak-to-peak voltage was up to 1.58 V derived by a sinusoidal acceleration of 10 m/s2.
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