Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

A Mems Tensile Testing Device For Mechanical Characterization Of Individual Nanowires

Mechanical Characterization Device For In Situ Measurement Of Nanomechanical Properties Of Micro/Nanostructures

Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System

MEMS Device for Quantitative in Situ Mechanical Testing in Electron Microscope

Testing device for force-electricity property under nanowire original position stretching in transmission electron microscope

A Dual-Drive Mode MEMS Device for In-Situ Static/dynamic Electro-Mechanical Characterization of Nanomaterials

Design of Tensile Device of Nanomaterials and Quantitative Analysis

Piezoresistivity Characterization of Silicon Nanowires Using a MEMS Device

Note: Mechanical and Electrical Characterization of Nanowires in Scanning Electron Microscope.

In Situ Mechanical Testing of Templated Carbon Nanotubes

Design of a Novel Tensile Testing Device and Its Application in Tensile Testing Experiments on Copper Micro Wires

Microelectromechanical System for in Situ Quantitative Testing of Tension-Compression Asymmetry in Nanostructures

Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing

3D Printed Micro-Mechanical Device (MMD) for in Situ Tensile Testing of Micro/nanowires

In situ nanomechanical measurement of Cu nanowires

Real-Time Quantitative Electromechanical Characterization of Nanomaterials Based on Integrated MEMS Device

An Off-chip Actuated Tensile Test Device for Microscale Mechanical Testing

MEMS based nanomechanical testing method with independent electronic sensing of stress and strain

Analysis of A Microelectromechanical System Testing Stage for Tensile Loading of Nanostructures

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

Nanomechanical behavior of single taper-free GaAs nanowires unravelled by in-situ TEM mechanical testing and molecular dynamics simulation