Abstract:High‐quality crystalline micro‐ and nanostructures based on inorganic semiconductors including zinc oxide (ZnO) have attracted considerable interest in electronic and optoelectronic applications due to their outstanding properties. ZnO micro‐ and nanocrystals can be fabricated by the moderate and high throughput hydrothermal synthesis. Yet it is restricted by patterning large‐area ZnO crystals with high‐quality and programmable geometries through the hydrothermal process for the optoelectronic integration. Here, a capillary‐bridge manipulation approach is demonstrated to control the dewetting process of ZnO precursor solution for patterning precursor arrays. Based on precursor arrays, vertically aligned high‐quality ZnO microrod arrays with homogeneous morphology and pure crystallographic orientation are fabricated via a hydrothermal epitaxial method. Statistical results and crystallization theories guide the experimental optimization and discussion of the crystallization mechanism, dominated by the competition between homogeneous nucleation and heterogeneous nucleation. High‐quality ZnO microbelt arrays are achieved through a surfactant‐mediated hydrothermal method after ZnO microrod arrays are transferred to a polydimethylsiloxane substrate. Photodetectors based on ZnO microbelts exhibit a high responsivity of 2.3 × 104 A W−1, a light on–off ratio exceeding 105, and stable recyclability. It is anticipated that this work provides new insights into patterning inorganic high‐quality micro‐ and nanostructures for multi‐functional integrated devices.

Highly Ordered Growth of ZnO Nanostructures by Combination of Nanoimprint Lithography and Hydrothermal Method

Effect of UV irradiation on the properties of ZnO nanorod arrays prepared by hydrothermal method

Conversion of large-scale oriented ZnO rod array into nanotube array under hydrothermal etching condition via one-step synthesis approach

Ordered Growth and Photoluminescence of ZnO Nano-Arrays on Silicon Substrates with Seed Film by Hydrothermal Method

Alignment-controlled Hydrothermal Growth of Well-Aligned ZnO Nanorod Arrays

Controllable Growth of Highly Ordered ZnO Nanorod Arrays Via Inverted Self-Assembled Monolayer Template.

Thermal-desorption Induced Enhancement and Patterning of Ultraviolet Emission in Chemically Grown ZnO

Sequential Occurrence of ZnO Nanopaticles, Nanorods, and Nanotips During Hydrothermal Process in a Dilute Aqueous Solution

Large-area zinc oxide nanorod arrays templated by nanoimprint lithography: control of morphologies and optical properties

Wafer-scale High-Throughput Ordered Growth of Vertically Aligned ZnO Nanowire Arrays.

Fabrication of surface-patterned ZnO thin films using sol-gel methods and nanoimprint lithography

Nonlithographic Fabrication of Nanostructured Micropatterns Via Breath Figures and Solution Growth

Fabrication and Optical Properties of Highly Ordered ZnO Nanodot Arrays

Ordered growth of metal oxides in patterned multi-angle microstructures

Controllable Heterogeneous Nucleation for Patterning High‐Quality Vertical and Horizontal ZnO Microstructures toward Photodetectors

The growth mechanism and optical properties of ultralong ZnO nanorod arrays with a highaspect ratio by a preheating hydrothermal method

Hydrothermally Grown ZnO Nanostructures on the Different Substrates

Hierarchical Construction of ZnO Architectures Promoted by Heterogeneous Nucleation

High-Resolution Nanosphere Lithography (nsl) to Fabricate Highly-Ordered Zno Nanorod Arrays

Hydrothermal Grow th of Vertical and Uniform ZnO Nanorod Arrays and Related Influences

Controlled Synthesis of 1D ZnO Nanostructures Via Hydrothermal Process