Preparation of Solid Electrolyte PVDF on MOS2 in Silicon MCP for Three-Dimensional Li Ion Microbatteries

Huayan Zhang,Tao Liu,Fei Wang,Wang, Lianwei
DOI: https://doi.org/10.1109/icsict.2010.5667864
2010-01-01
Abstract:We report the preparation of MOS2 anode and solid electrolyte PVDF for the construction of three-dimensional (3D) Li-ion microbatteries based on silicon MCP. The MoS2 layer anode electrode on the Ni layer exhibits a higher specific capacity compared to other anode materials. The outstanding electrochemical property of the MOS2 layer makes it promising anode materials. The PVDF as the electrolyte matrix is introduced into the MCP arrays by repetitive pumping and spinning. The smooth and conformal membrane prepared forms the basis of the 3D Li-ion microbattery.
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