Design of Digital Gray-tone Lithography Lens

Ming-yong CHEN,Jing-lei DU,Xiao-wei GUO,Yan-qing MA,Jing-quan WANG
2009-01-01
Abstract:Based on the established research results of digital gray-tone lithography imaging system, taking some effects such as work efficiency, resolution, cost for fabrication, and so on into account, a lithography lens which can effectively remove the image pixel structure was designed. The technical data are as follows: numerical aperture is 0.3, work wavelength is 442 nm, ratio is 10×, work resolution is 1.2 μm, depth of focus is 4μm, and less elements, low requirement for tolerance in fabrication and assemblage. The result shows that the lens can sufficiently meet the requirement of high-quality imaging in digital gray-tone lithography.
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