Sensor Diaphragm under Initial Tension: Nonlinear Interactions During Asymmetric Oscillations

Xinhua Long,Miao Yu,Balakumar Balachandran
DOI: https://doi.org/10.1115/imece2008-66821
2009-01-01
Abstract:In this article, investigations into the nonlinear asymmetric vibrations of a pressure sensor diaphragm under initial tension are presented. A comprehensive mechanics model based on a plate with in-plane tension is presented and the effect of cubic nonlinearity is studied on the nonlinear asymmetric response when the excitation frequency is close to the natural frequency of an asymmetric mode of the plate. The obtained results show that in the presence of an internal resonance, depending on the initial tension, the response can have not only the form of a standing wave but also the form of a traveling wave. The results of this work should be relevant to diaphragm-type structures used in micro-scale sensors including pressure sensors.
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