The Arc-Length Method for Solving the Coupled Equation of Mechanics-Electricity

YANG Xiao-bin,ZHOU You-he,WANG Xiao-jun
2009-01-01
Abstract:Flexible plate subjected to static electric force is a key component of MEMS.And its governing equation is a group of nonlinear coupled equation consisted of static equilibrium equation and static electric equilibrium equation.On the based of giving the means of solving these equations,that the arc-length method is generalized result in loading pattern change that turn directly loading voltage into indirectly loading voltage by deflection control.It is shown that the method not has the excellent convergence but be able to give the deformation after pull-in.Numerical examples show that pull-in threshold calculated by this method is more agreement with experiment value than analytical model.
What problem does this paper attempt to address?