Microelectrode array for detecting electrical activities of neuron assemble

Haixian Pan,Xiaoying Lü,Zhigong Wang,Yufeng Wang,Huiqin Lu,Hongmei Shen
DOI: https://doi.org/10.3969/j.issn.1001-0505.2009.03.010
2009-01-01
Abstract:A 2 × 2 microelectrode array (MEA) for in-vitro detection of electrophysiological activities of neuron assemble is reported. It consists of four round electrodes with a diameter of 20μm each and a distance of 100μm between the centers of electrodes. Ground plane was placed as a reference electrode around all the four electrodes, and the spaces between the reference electrode and each electrode center were respectively defined as 5, 10, 15 and 20μm. The layout design and verification was completed with Zeni tools (Huada Corp., China). It was realized in a standard 0.6μm DMDP CMOS technology of CSMC (Wuxi, China). The final chip covers an area of 0.28 mm × 0.40 mm. Impedance measurements on wafer of the four electrodes were carried out with an 10 Hz to 1 MHz and 50 mV AC signal. The results show that the impedance of the electrodes lies in the range of 0.7-2.1MΩ at about 10 kHz, which meets the requirements of extracellular recording. On-chip biological experiments with culturing hippocampal neurons of embryonic rats and L-929 cells are presented. The results show that the chip can be used in biological experiments after surface biocompatibility modification.
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