A Vertical Integrated Diode for CMOS Color Image Sensor

Yuan CHEN,Zhi-hai XU,Hua-jun FENG
DOI: https://doi.org/10.3321/j.issn:0372-2112.2009.05.012
2009-01-01
Tien Tzu Hsueh Pao/Acta Electronica Sinica
Abstract:The vertical integrated diode can sense blue and red illumination simultaneously, it can provide full color information with green/magenta filter on it. It can also be the pixel of the CMOS image senor for its fully compatible with standard CMOS process. Its basic principle is to use the silicon's differences of penetration depths of electromagnetic waves with different wavelengths, i.e., blue light with short wavelength is absorbed mainly at surface while red light with longer wavelength is absorbed deeper. Through extraction of photogenerated carrier at different depth by vertical integrated diode with two color filters, we get the full color image. The numerical simulation and the experimental device show that it can provide color information and can be applied in CMOS image sensor pixel design.
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