Measurement of Elastic Thermal Stress in COB Packaging Structures

Fanxiu Chen,Xiaoyuan He
DOI: https://doi.org/10.1117/12.839039
2008-01-01
Abstract:Digital speckle correlation method (DSCM) is used to measure the thermomechanical coupling effect in COB packaging structures. During deformation, CCD camera is applied to capture the speckle patterns of CMOS chip at different temperature fields constantly. These speckle patterns would provide the deformation history of the sample. By analyzing the speckle patterns, the in-plane deformation of the CMOS chip is obtained. Based on the trigonometrical theory, outplane displacement can be obtained from in-plane displacement, and then the elastic thermal stress of the chip is evaluated when the application of the temperature field is repeated. Experiment results are compared with both the results of FEM simulation and the theoretical model. There results are agreed well and it can be proved that DSCM can successfully be applied to analyze the thermomechanical coupling effect. The theoretical model was also verified by result of FEM simulation and experiment testing. Experiment results provide an availability consult to the design of MEMS apparatus.
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