Micro assembled fourier transform spectrometer

Yanmei Kong,Jingqiu Liang,Zhongzhu Liang,Bo Wang,Jun Zhang
DOI: https://doi.org/10.1117/12.828282
2009-01-01
Abstract:With the trend of minimization of Fourier transform spectrometer (FTS) which is particularly pronounced in many applications, a model of a micro FTS with no moving parts is proposed and analyzed. During analyzng, the gradients which mainly introduce phase error are accounted. Based on these assumptions and the improved Mertz phase correcting method, the spectrum of signal is simulated with real extended light source. The resolution can be up to 3.43nm@800nm, with high signal-to-noise ratio (SNR) limiting resolving ability 6.8dB. In addition, the fabrication method of components are illuminated and demonstrated, which can not only make it bear some advantages over conventional micro dispersive spectrometers, but also afford some new concepts on the design of spectrometers with improved performance. © 2009 SPIE.
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