Rapid impedance change and electron power absorption mode transition during gas breakdown under radio-frequency excitation
Xiang-Yu Wang,Quan-Zhi Zhang,You-Nian Wang
2020-01-01
Abstract:Gas breakdown――|when the medium changes from an insulating phase to a conducting phase ―― is a spectacular phenomenon that takes place every time upon the initiation of any gas discharge [1, 2]. Contrary to this, breakdown is an unwanted phenomenon in electrical insulation, but in both cases the detailed understanding of the relevant physical effects is of utmost importance. Its simplest form, i.e., the Townsend breakdown in a dc electric field has been investigated for many decades. Whereas, the breakdown process under radio-frequency (rf) excitation exhibits its complexity, and most of relevant studies have been devoted to determination of a “breakdown curve”, which describes the dependence of the breakdown voltage on the product of the gas pressure and the electrode gap. Details of the gas breakdown process, e.g., time evolution of electrical and plasma characteristics, under rf excitation are far from being well understood [2]. In this work, time evolution of the electrical and plasma characteristics since the beginning of the excitation pulse is studied on the nanosecond time scale by a synergistic combination of experiments (performed in a paralell-plate pulsed capacitively coupled rf discharge in Argon with the use of multifold diagnostics), kinetic simulations (based on the particle-in-cell approach coupled with Monte Carlo collision) and an analytical model. During the breakdown process the system is found to undergo a sequence of distinct electron power absorption modes, i.e. “avalanche”, “overshoot”, “DA”, and α modes, which were found to be highly correlated with the rapid changes of the system impedance as the plasma is building up. Figure 1 shows the time evolution of the voltage, VRF, the current amplitudes: the total, conduction and displacement current, IRF, Ic and Id, respectively, the relative phase between VRF and IRF, φvi. Ic and Id are provided in the center of the electrode gap. The time axis is divided into three phases in Figure 1: (i) pre-breakdown (t < t1), (ii) breakdown (t1 < t < t2), and (iii) post-breakdown (t > t2). During the prebreakdown phase, the system behaves like a gas-filled capacitor. The charge density is so low that Ic is negligible compared to Id. φvi remains at 90 for dozens of rf cycles after an initial rise, and Irf follows closely the increasing Vrf. This indicates a pure capacitive impedance, so that rf power is hardly deposited. During breakdown phase, Ic contributes increasingly to Irf, while Id decays, because the externally applied potential is gradually shielded by the formation of space charge regions adjacent to the electrodes. Shortly after t1, Irf increases quickly, due to the rapidly growing Ic, while Vrf drops slightly in the experiment. The opposite trends of Ic and Id lead to a fast drop of φvi from 90 to a minimum of 62, corresponding to an increased resistance of the system. In the postbreakdown phase, the increase of Irf slows down, and Irf is now dominated by Ic, due to the attenuation of Id.