Abstract:The ablation threshold, depth and crater shape of fused silica for femtosecond laser processing are investigated theoretically and experimentally. Based on tracking the spatiotemporal distribution of the free electron density, free electron temperature, and laser intensity, the electron dynamics as well as the transient optical and thermophysical properties of femtosecond laser irradiated fused silica are quantitatively determined. The numerical model is validated by comparing the calculated threshold fluence, depth and crater shape of ablation with the experimentally measured ones at a wavelength of 800 nm. The free electron relaxation time at different laser fluences and pulse durations throughout the photoionization process and impact ionization process are probed. In the present work, the findings are as follows. 1) The electron relaxation time significantly affects the material optical properties and femtosecond laser energy absorption. The optical properties change dramatically. The fused silica becomes opaque for the case of laser irradiation with fluence higher than the ablation threshold. Moreover, the transition from electron-phonon collision to electron-ion collision accompanies with the femtosecond laser ablation of fused silica. 2) By using the proposed model, the experimentally observed saturation of ablation depth at high laser fluence is elucidated by the significant change of optical reflectivity and absorption coefficient. Both the results of theoretical simulation and experimental observation indicate that laser fluence has a strong influence on the shape of the ablation crater. The ablation volume increases sharply with the increase of laser fluence for femtosecond laser irradiation, compared with that for picosecond laser irradiation. 3) With the increase of femtosecond laser fluence, the ablation depth removal efficiency and ablation efficiency are both saturated, followed by slight decrements. The peak of ablation depth removal efficiency peak occurs at the femtosecond laser fluence close to 1.4 times of the ablation threshold. While the accuracy is slightly low due to the higher sensitivity of the ablation characteristics (ablation crater depth and ablation volume) to the shorter femtosecond laser pulse. For the femtosecond laser fluence higher than 3.5 times of the ablation threshold, good repeatability over a very wide fluence range can achieve accurate processing results, because a more consistent flat-bottom ablation profile tends to appear. However, the heat-affected zone leads the processing quality to degrade, compared with the scenario of femtosecond laser fluence close to the ablation threshold.

Laser Mode-Dependent Size of Plasma Zones Induced by Femtosecond Laser Pulses in Fused Silica

Simulation of femtosecond laser pulse propagation in air

Thermal Diffusion and Thermal Melting in Femtosecond Laser Micromachining

Controllable Photon Energy Deposition Efficiency in Laser Processing of Fused Silica by Temporally Shaped Femtosecond Pulse: Experimental and Theoretical Study

Filamentation and Temporal Reshaping of A Femtosecond Pulse in Fused Silica

Multiple Foci and a Long Filament Observed with Focused Femtosecond Pulse Propagation in Fused Silica.

Spatiotemporal Probe into the Femtosecond Laser Processing of Fused Silica

Temporal-spatial Dynamics of Femtosecond Time Resolved Plasma in Femtosecond Laser Induced Microstructure

Theoretical and Experimental Research of Femtosecond Laser Processing Fused Silica

Numerical simulation study on distinguishing nonlinear propagation regimes of femtosecond pulses in fused silica

Morphological Investigation at the Front and Rear Surfaces of Fused Silica Processed with Femtosecond Laser Pulses in Air.

Effect of Spherical Aberration on the Propagation of A Tightly Focused Femtosecond Laser Pulse Inside Fused Silica

Mechanisms In Fs-Laser Ablation In Fused Silica

Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica

Simulation of Femtosecond Laser-Induced Periodic Surface Structures on Fused Silica by Considering Intrapulse and Interpulse Feedback

Enhancing the Expansion of a Plasma Shockwave by Crater-Induced Laser Refocusing in Femtosecond Laser Ablation of Fused Silica

The Spatiotemporal Dynamics of Electron Plasma in Femtosecond Laser Double Pulses Induced Damage in Fused Silica

Competition Between Multiphoton/tunnel Ionization and Filamentation Induced by Powerful Femtosecond Laser Pulses in Air

Study on the influence of side-blown airflow velocity on plasma and combustion waves generated from fused silica induced by combined pulse laser

Beam Collapse and Refractive Index Changes Inside Fused Silica Induced by Loosely Focused Femtosecond Laser

Filamentation of interacting femtosecond laser pulses in air