Foreign Development of Piezoelectric Generators for MEMS

CHU Jin-kui,DU Xiao-zhen,PIAO Xiang-gao
DOI: https://doi.org/10.3969/j.issn.1004-2474.2008.01.008
2008-01-01
Abstract:The development of micro fabrication impulses the sensor micromation and integration,and the sensor function becomes more comprehensive.On contrary,the power dissipation and volume decrease to very low and small.Researches on micro batteries develop slowly compared with other parts in the sensors.As a result the power supply has been a bottleneck in the design of MEMS.This paper introduces the development of piezoelectric generators harvesting ambient energy,radioisotope energy and human body energy.Such power source supplies have long lifetime and high energy density,which can integrate with MEMS.The successful research on the generators will bring fast increasing in system of micro wireless sensors and other self-power MEMS.
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