Gas Sensitivity Mechanism of Nanometer Particle ZnO Thin Films

杜明贵,陆慧,周康夫,邵志翔,潘孝仁
2008-01-01
Abstract:Nanometer particle ZnO thin films grown at low temperature were deposited by gas discharge active reaction evaporation.The ethanol sensitivity of ZnO thin films was tested at various temperatures.The results show that the highest sensitivity of nanometer particle ZnO thin films is 9.76,about at 285 ℃,while the optimum operating temperature area is narrow.The surface morphology,section view and optical transmittance spectra was investigated by atomic force microscopy(AFM),scan electron(microscopy(SEM)) and spectrophotometer.We speculate the films have porous columnar structure.Considering complex impedance spectra of ZnO thin films in air and ethanol gas,the gas sensitivity mechanism of nanometer particle ZnO thin films was discussed on the effect of grain and grain boundary.
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